Preparation of norbornane-based PAC ballasts

ABSTRACT

Embodiments in accordance with the present invention provide for norbornane-type ballast materials, norbornane-type photoactive compounds derived from such ballast materials and alkali-soluble positive-tone polymer compositions that encompass such norbornane-type photoactive compounds and one of a PBO or PNB resin.

CROSS-REFERENCED TO RELATED APPLICATION

This application is entitled to and claims priority to the U.S.Provisional Patent having Ser. No. 61/387,096, filed Sep. 28, 2010 andentitled “Preparation of Norbornane-based PAC Ballasts.” SuchProvisional Patent is incorporated herein by reference in its entirety.

TECHNICAL FIELD

The present invention relates generally to positive-tone photosensitiveresin compositions that encompass a photoactive compound (PAC) and thestructures formed therefrom or thereusing and more specifically to suchresin compositions encompassing PACs made from norbornane-based ballast(NBane-type ballast) materials, methods of making such ballast materialsand the PAC materials and the structures formed therefrom or thereusing.

DETAILED DESCRIPTION

Polyimide (PI), polybenzoxazole (PBO) and polynorbornene (PNB) resinsgenerally are known materials that are used for forming a surfaceprotecting layer or an interlayer dielectric in the manufacture ofsemiconductor devices. To effectively integrate such resins into normalsemiconductor processing, it has been found advantageous to provide suchresins in the form of a positive-tone, aqueous base developable,photosensitive resin composition. In this manner, a separate pattern andetch process utilizing a photoresist material is avoided to form apatterned layer of such resins.

While various types of such PI, PBO and PNB photosensitive resincompositions are known, the miniaturization and high integration ofsemiconductor devices has, in recent years, placed a demand on resincomposition suppliers for materials with both a lower resin curetemperature and enhanced imageability.

It has been shown that photosensitive resin compositions of the aboveresins can be made by incorporating therein, a photo-active compound(PAC). For example, in U.S. Pat. No. 7,781,131 to Hiroaki Makabe,entitled “Positive photosensitive resin composition, cured layer,protecting layer, insulating layer and semiconductor device and displaytherewith” (the '131 patent), the use of a diazoquinone-based PACprovides for a positive-type photosensitive PBO resin composition whichcan be developed using an alkaline aqueous solution. The aforementioneddiazoquinone compound based PACs of the '131 patent are derived fromballast materials that encompass one or more phenolic moieties wheresuch moieties are reacted with 1,2-naphthoquinone-2-diazido-5-sulfonicacid, 1,2-naphthoquinone-2-diazido-4-sulfonic acid or the like. Whensuch PACs are mixed with, for example a polybenzoxazole resin precursor,an appropriate casting solvent and a cyclic compound having an alcoholichydroxyl group, a photosensitive resin composition capable of being castonto a substrate to form a film is provided. Once such a film is formed,an image can be developed by an image-wise exposure of the cast resinfilm with an appropriate wavelength of actinic radiation and thesubsequent removal of regions of the film made soluble by such exposure.This image forming process is well known and discussed in the '131patent.

Once such an image is formed, the '131 patent describes how the PBOresin precursor is dehydrated by ring-closing during a curing processusing an elevated temperature appropriate to cause such ring-closurethus forming a polybenzoxazole resin having high heat resistance.However, remarkable miniaturization and high integration ofsemiconductor chips in recent years has reduced heat resistance,particularly of storage chips, and increased the need for PACs thatprovide increased image resolution and contrast. With regard to heatresistance, the '131 patent provides for embodiments comprising a PBOresin precursor capable of being cured at appropriately low temperaturesand after such curing providing excellent thermal stability. The currentapplication provides embodiments of norbornane-based ballasts that arecapable of being formed into PACs that provide the desired increasedimage resolution and contrast in PBO resin compositions as well as inappropriate PNB resin compositions.

More specifically, embodiments in accordance with the present inventionuse hydroarylation chemistry to generate norbornane-arylol linkages andto join norbornane or similar units to one another. The phenolnorbornane/polycyclic structures that such embodiments provide are thenreadily converted to useful PACs by reaction with one of the followingsulfonic acids or their respective acid chlorides:1,2-naphthoquinone-2-diazido-5-sulfonic acid,1,2-naphthoquinone-2-diazido-4-sulfonic acid or2-diazo-4-hydrosulfonylcyclohex-3-enone, the structures of which areshown, respectively below, to form the esters thereof:

Some exemplary phenolic structures encompassing norbornane-type moieties(also referred to as NBane-type polyols, NBane-type arylols, orNBane-type ballast moieties) that are in accordance with the NBane-typeballast and NBane-type PAC embodiments of the present invention areprovided. In addition, several exemplary methods for making suchstructures and exemplary methods for reacting such NBane-typepolyolstructures to form the aforementioned NBane-type PACs are also provided.Such NBane-type ballast moieties include, but are not limited to thefollow exemplary structures:

Other, NBane-type ballast moieties include, but are not limited to:

where ArOH is understood to represent a substituted or unsubstitutedaryl hydroxide moiety (also referred to as an arylol), and for eachstructure having in excess of one ArOH, it will be understood that suchexcess ArOHs are optional.

While specific examples for the preparation of several of the aboveNBane-type arylols is provided below, in general most synthetic routesbegin by forming both an arylol and one of a norbornenone, a norbornenecarboxaldehyde, a phenylene(norbornanone), anorbornene-alkylene-norbornene (where alkylene represents an alkyl chainof 2 or more carbons), a norbornene-aryl(cycloalkyl)-norbornene (wherearyl(cycloalkyl) represents either an aryl group or a cyclic alkylgroup) or a norbornene dimer. Where such NBane-type beginning materialis an aldehyde or ketone, addition across the carbonyl bond by an arylolcan be accomplished to provide a di-arylol result at each carbonyl, thusforming an NBane-type arylol. Where such norbornene-type startingmaterial is absent a carbonyl group, one or more such carbonyl groupscan be added and an NBane-type arylol is formed as described above.Alternately, an arylol can be added across any C═C bonds that arepresent, for example via a hydroarylation reaction. In this manner,NBane-type arylols can be advantageously formed with essentially anynumber of arylol substituents and is thus distinct from the teachings ofU.S. Pat. No. 3,517,071 (the '071 patent) which only teaches theformation of diphenol moieties where a single carbon atom is covalentlybonded to two phenol moieties. Such single carbon atom being one of acarbon within the polycyclic structure or a methylene group, not withinthe polycyclic structure, that is covalently bonded to a polycyclic ringcarbon. The '071 patent being directed to the preparing geminal diphenolmoieties that are useful for preparing polymers having improvedtemperature properties and solubility in volatile solvents.

Further to distinguishing embodiments in accordance with the presentinvention from the disclosures of the '071 patent, NBane-type polyolssuch as PP429 and PP691, the structures of which are provided above, canbe seen to provide both a single arylol substitution and a diphenolsubstituted methylene in the former and in the latter two norbornanestructures, each having a geminal diphenol substitution, linked to oneanother by an aromatic linking group. With regard to PP429, the '071patent does not teach or even suggest a method for providing any arylolsubstitution other than a geminal diarylol substitution, thus PP429distinguished from the teachings and disclosure of such patent. Turningto PP691, while such structure only encompasses geminal diarylolsubstitution of norbornane, as mentioned above, such structure alsoencompasses an aromatic linking group to a second diphenol substitutednorbornane and hence is also distinguished from the teachings anddisclosure of the '071 patent.

It will be understood that as used herein, above and below, reference tonorbornene-type moieties, starting materials or structures refers to apolycyclic structure in accordance with Structure 1 shown below, where mis an integer from 0 to 3, at least one of R^(a), R^(b), R^(c) or R^(d)is not hydrogen and R^(e) is W or W* as defined below. It will furtherbe understood that as used herein, above and below, reference tonorbornane polyols, ballast or PACs refers to such a materialsencompassing at least one polycyclic structure in accordance withStructure 2 shown below, where m is as defined for Structure 1 and atleast one of R^(a), R^(b), R^(c) or R^(d) is a substituted orunsubstituted arylol and R^(c) is W or W* as defined below.

Further, while specific examples of forming a PAC from NBane-typearylols are provided, in general, the reaction is carried out by firstforming a solution of a specific NBane-type arylols with an appropriateamount of one of the aforementioned sulfonic acids or their analogousacid chlorides and then adding an excess of an organic amine such astriethyl amine, and then adding to such solution. It will be understoodthat the appropriate amount of sulfonic acid or acid chloride is afunction of a desired amount of ester formation. Generally suchreactions are carried out at or near room temperature and yield amixture of products characterized by the number of phenols that areconverted to sulfonic acid esters.

The substitution of the norbornyl unit by arylols can be such that themolecules generated are either symmetric or asymmetric based on reactionsites or through stereo isomers. It is believed that it is advantageousfor such NBane-type polyols to encompass a number of isomers as the PACsformed will likely impart improved solubility in the various resincompositions. Likewise, the endo/exo-substitution of norbornenefragments can lead to mixtures of diastereomers, which also is believedto be likely to impart improved solubility of the resulting PACs in thephotosensitive resin composition embodiments that are in accordance withthe present invention.

NBane-type ballast embodiments in accordance with the present inventiontherefore encompass a NBane-type moiety having either onenorbornane-type structure or more than one norbornane-type structure.Where there are more than one norbornane-type structure, such structuresare joined by one or more covalent bonds or by one or more linkinggroups as defined below. Further, where there are more than onenorbornane-type structure, at least one of such structures encompassesone or more arylol substituents.

In some such embodiments, each arylol substituent can also include oneor more other substituents selected from a halogen, a C₁ to C₆ alkyl, aC₃ to C₁₂ cycloalkyl and a substituted or unsubstituted phenyl group.

Still further, some of the norbornane-type ballast embodiments of thepresent invention can be represented by one of the followingnorbornane-type structures:

where for each formulae, each n is an independently selected integerfrom 0 to 3; Z represents one to four substituted or unsubstituted ArOHsubstituents (arylols); W in formula AA is either a covalent bond or adivalent linking group selected from a C₁ to C₁₂ alkyl, ether orpolyether, a C₃ to C₁₂ cycloalkyl, aryl or alkaryl group, or one or morenorbornane-type moieties, W* in formula BB is optional and, if present,is monovalent and can be described generally as a C₁ to C₁₂ alkyl, etheror polyether, a C₃ to C₁₂ cycloalkyl, aryl or alkaryl group, or one ormore norbornane-type moieties; and more specifically W* can be—(CH₂)_(n)*CH₃, —(CH₂)_(n)Ph, —(CH₂)_(s)O(CH₂CH₂O)_(t)H,—(CH₂)_(s)OCH₂C(H)(O)CH₂, —(CH₂)_(s)C(H)(O)CH₂,—(CH₂)_(s)O(CH₂CH₂O)_(t)C(O)CH₃, —(CH₂)_(s)(O)CH₃,—(CH₂)_(s)O(CH₂CH₂O)_(t)*CH₃, —(CH₂)_(s)OCH₂CH₂OCH₂C(CF₃)₂OH,—(CH₂)_(s)C(CH₃)₂OH, —(CH₂)_(s)OCH₂C(CF₃)₂OH, —(CH₂)_(s)CO₂Et,—(CH₂)₂CO₂H, —(CH₂)_(s)C₆H₄OH, —(CH₂)_(s)C(O)C₆H₄OH,—(CH₂)_(s)C(O)NHC₆H₄OH, and —(CH₂)_(s)N(H)S(O)₂CF₃; where n and n* areintegers from 0 to 6 or 0 to 11, respectively; s is an integer from 1 to6; and t is 0 or 3 and t* is 2 or 3.

Exemplary NBane-type ballasts encompassed by the ballast embodiments inaccordance with the present invention include, but are not limited to:4-(5-hexylbicyclo[2.2.1]heptan-2-yl)-2-methylphenol,4-(5-hexylbicyclo[2.2.1]heptan-2-yl)-2-isopropylphenol,2-cyclohexyl-4-(5-hexylbicyclo[2.2.1]heptan-2-yl)-5-methylphenol,4-(5-decylbicyclo[2.2.1]heptan-2-yl)-2-methylphenol,4-(5-decylbicyclo[2.2.1]heptan-2-yl)-2-isopropylphenol,2-cyclohexyl-4-(5-decylbicyclo[2.2.1]heptan-2-yl)-5-methylphenol,4-(5-2,5,8,11-tetraoxadodecylbicyclo[2.2.1]heptan-2-yl)-2-methylphenol,4-(5-2,5,8,11-tetraoxadodecylbicyclo[2.2.1]heptan-2-yl)-2-isopropylphenol,4-(5-2,5,8,11-tetraoxadodecylbicyclo[2.2.1]heptan-2-yl)-2-cyclohexyl-5-methylphenol,2-methyl-4-(5-phenylbicyclo[2.2.1]heptan-2-yl)phenol,2-isopropyl-4-(5-phenylbicyclo[2.2.1]heptan-2-yl)phenol,2-cyclohexyl-4-(5-phenylbicyclo[2.2.1]heptan-2-yl)phenol, ethyl3-(5-(4-hydroxy-3-methylphenyl)bicyclo[2.2.1]heptan-2-yl)propanoate,ethyl3-(5-(4-hydroxy-3-isopropylphenyl)bicyclo[2.2.1]heptan-2-yl)propanoate,ethyl3-(5-(3-cyclohexyl-4-hydroxyphenyl)bicyclo[2.2.1]heptan-2-yl)propanoate,4-(bicyclo[2.2.1]heptan-2-yl)-2-methylphenol,4-(bicyclo[2.2.1]heptan-2-yl)-2-isopropylphenol,4-(5-((2-methoxyethoxy)methyl)bicyclo[2.2.1]heptan-2-yl)-2-methylphenol,2-isopropyl-4-(5((2-methoxyethoxy)methyl)bicyclo[2.2.1]heptan-2-yl)phenol,2-cyclohexyl-4-(5-((2-methoxyethoxy)methyl)bicyclo[2.2.1]heptan-2-yl)-5-methylphenol,4-(5-((2-(2-methoxyethoxy)ethoxy)methyl)bicyclo[2.2.1]heptan-2-yl)-2-methylphenol,2-isopropyl-4-(5-((2-(2-methoxyethoxy)ethoxy)methyl)bicyclo[2.2.1]heptan-2-yl)phenol,2-cyclohexyl-4-(5-((2-(2-methoxyethoxy)ethoxy)methyl)bicyclo[2.2.1]heptan-2-yl)-5-methylphenol,2-methyl-4-(5-(3,3,3-trifluoro-2-hydroxy-2-(trifluoromethyl)propyl)bicyclo[2.2.1]heptan-2-yl)phenol,2-isopropyl-4-(5-(3,3,3-trifluoro-2-hydroxy-2-(trifluoromethyl)propyl)bicyclo[2.2.1]heptan-2-yl)phenol,2-cyclohexyl-4-(5-(3,3,3-trifluoro-2-hydroxy-2-(trifluoromethyl)propyl)bicyclo[2.2.1]heptan-2-yl)phenol,4-(5-benzylbicyclo [2.2.1]heptan-2-yl)-2-methylphenol,4-(5-benzylbicyclo[2.2.1]heptan-2-yl)-2-isopropylphenol, 4-(5-(2-methylbicyclo[2.2.1]heptane)bicyclo[2.2.1]heptan-2-yl)-2-cyclohexylphenol,4-(bicyclo[2.2.1]heptan-2-yl)-2-cyclohexylphenol,4-(5-benzylbicyclo[2.2.1]heptan-2-yl)-2-methylphenol, 4-(5-(2-methylbicyclo[2.2.1]heptane)bicyclo[2.2.1]heptan-2-yl)-2-isopropylphenol,4-(5-(2-methylbicyclo[2.2.1]heptane)bicyclo[2.2.1]heptan-2-yl)-2-cyclohexylphenol,4-(decahydro-1,4:5,8-dimethanonaphthalen-2-yl)-2-methylphenol,4-(decahydro-1,4:5,8-dimethanonaphthalen-2-yl)-2-isopropylphenol,4-(decahydro-1,4:5,8-dimethanonaphthalen-2-yl))-2-cyclohexylphenol,4-(5-(4-hydroxybenzyl)bicyclo[2.2.1]heptan-2-yl)-2-methylphenol,4-(5-(4-hydroxybenzyl)bicyclo[2.2.1]heptan-2-yl)-2,5-dimethylphenol,2-cyclohexyl-4-(5-(methoxymethyl)bicyclo[2.2.1]heptan-2-yl)-5-methylphenol,4-(5-(methoxymethyl)bicyclo[2.2.1]heptan-2-yl)-2-methylphenol,2-methyl-4-(5-((oxiran-2-ylmethoxy)methyl)bicyclo[2.2.1]heptan-2-yl)phenol,2-cyclohexyl-5-methyl-4-(5-((oxiran-2-ylmethoxy)methyl)bicyclo[2.2.1]heptan-2-yl)phenol,2-methyl-4-(5-(6-(oxiran-2-yl)hexyl)bicyclo[2.2.1]heptan-2-yl)phenol,2-cyclohexyl-5-methyl-4-(5-(6-(oxiran-2-yl)hexyl)bicyclo[2.2.1]heptan-2-yl)phenol,2-cyclohexyl-4-(5-(methoxymethyl)bicyclo[2.2.1]heptan-2-yl)-5-methylphenol,4-(5-(hydroxymethyl)bicyclo[2.2.1]heptan-2-yl)-2-methylphenol,5-(5-cyclohexyl-4-hydroxy-2-methylphenyl)bicyclo[2.2.1]heptan-2-yl)methylacetate, and(5-(4-hydroxy-3-methylphenyl)bicyclo[2.2.1]heptan-2-yl)methyl acetate.

Also, 4,4′-(bicyclo[2.2.1]heptan-2-ylmethylene)bis(2-methylphenol),4,4′-(bicyclo[2.2.1]heptane-2,2-diyl)bis(2-methylphenol),4,4′-(((5S)-5-phenylbicyclo[2.2.1]heptan-2-yl)methylene)bis(2-methylphenol),4,4′4(5S)-5-phenylbicyclo[2.2.1]heptane-2,2-diyl)bis(2-methylphenol),4,4′-((5-phenylbicyclo[2.2.1]heptan-2-yl)methylene)bis(2-isopropyl-5-methylphenol),4-(2-(4-hydroxy-3-isopropyl-5-methylphenyl)-5-phenylbicyclo[2.2.1]heptan-2-yl)-2-isopropyl-5-methylphenol,4,4′-((5-phenylbicyclo[2.2.1]heptan-2-yl)methylene)bis(2-cyclohexyl-5-methylphenol),2-cyclohexyl-4-(2-(3-cyclohexyl-4-hydroxy-5-methylphenyl)-5-phenylbicyclo[2.2.1]heptan-2-yl)-5-methylphenol,4,4′-(bicyclo [2.2.1]heptane-2,5-diyl)bis(2-methylphenol),4,4′-(bicyclo[2.2.1]heptane-2,5-diyl)bis (2-isopropylphenol),4,4′-(tetracyclo[6.2.1.13,6.0.2,7]dodecan-2,7-diyl)bis (2-methylphenol),4,4′-(tetracyclo[6.2.1.13,6.0.2,7]dodecan-2,7-diyl)bis(2-isopropylphenol), 4,4′-(bicyclo[2.2.1]heptane-2,5-diyl)bis(2-cyclohexyl-5-methylphenol),4,4′-(tetracyclo[6.2.1.13,6.0.2,7]dodecan-2,7-diyl)bis(2-cyclohexyl-5-methylphenol),4,4′-(5,5′-(2,2′-oxybis(ethane-2,1-diyl))bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-cyclohexylphenol),4,4′-(5,5′-(2,2′-oxybis(ethane-2,1-diyl))bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-isopropylphenol),4,4′-(5,5′-(2,2′-oxybis(ethane-2,1-diyl))bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-methylphenol),4,4′-(5,5′-(butane-1,4-diyl)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-methylphenol),4,4′-(5,5′-(butane-1,4-diyl)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-isopropylphenol),2-cyclohexyl-4-(5-(4-(5-(3-cyclohexyl-4-methylphenyl)bicyclo[2.2.1]heptan-2-yl)butyl)bicyclo[2.2.1]heptan-2-yl)phenol,4,4′-(tetracyclo[6.2.1.13,6.0.2,7]dodecan-2-ylmethylene)bis(2-methylphenol),4,4′-(tetracyclo[6.2.1.13,6.0.2,7]dodecan-2-ylmethylene)bis(2-isopropylphenol),4,4′-(tetracyclo[6.2.1.13,6.0.2,7]dodecan-2-ylmethylene)bis(2-cyclohexyl-5-methylphenol),4,4′-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2-diyl)bis(2-methylphenol),4,4′-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-isopropylphenol),4,4′-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-cyclohexylphenol),4,4′-(5,5′-(biphenyl-4,4′-diyl)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-methylphenol),4,4′-(5,5′-(biphenyl-4,4′-diyl)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-isopropylphenol),4,4′-(5,5′-(biphenyl-4,4′-diyl))bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-cyclohexylphenol), 4,4′-(Pentacyclo[8.2.1.14,7.02,9.08,3]tetradecan-2,8-yl)bis(2-methylphenol),4,4′-(Pentacyclo[8.2.1.14,7.02,9.08,3]tetradecan-2,8-yl)bis(2-isopropylphenol),4,4′-(Pentacyclo[8.2.1.14,7.02,9.08,3]tetradecan-2,8-yl)bis(2-cyclohexyl-5-methylphenol),4,4′-(dodecahydro-1,4:5,8-dimethanobiphenylene-2,6-diyl)bis(2-methylphenol),4,4′-(dodecahydro-1,4:5,8-dimethanobiphenylene-2,6-diyl)bis(2-isopropylphenol),and 4,4′-(dodecahydro-1,4:5,8-dimethanobiphenylene-2,6-diyl)bis(2-cyclohexyl-5-methylphenol).

Further,4,4′(5-(4-hydroxy-3-methylphenyl)bicyclo[2.2.1]heptan-2-yl)methylene)bis(2-methylphenol),4,4′-((5-(4-hydroxy-3-isopropylphenyl)bicyclo[2.2.1]heptan-2-yl)methylene)bis(2-isopropylphenol),4,4′-((5-(3-cyclohexyl-4-hydroxyphenyl)bicyclo[2.2.1]heptan-2-yl)methylene)bis(2-methylphenol),4,4′-((5-(4-hydroxyphenyl)bicyclo[2.2.1]heptan-2-yl)methylene)bis(2-methylphenol),4,4′,4″-(bicyclo[2.2.1]heptane-2,2,5-triyl)tris(2-methylphenol),4,4′,4″-(bicyclo[2.2.1]heptane-2,2,5-triyl)tris(2-isopropylphenol),4,4′-(5-(3-cyclohexyl-4-hydroxyphenyl)bicyclo[2.2.1]heptane-2,2-diyl)bis(2-methylphenol),4,4′-(5-(4-hydroxyphenyl)bicyclo[2.2.1]heptane-2,2-diyl)bis(2-methylphenol),5′-(5-(4-hydroxybenzyl)bicyclo[2.2.1]heptan-2-yl)-3,3″-dimethyl-[1,1′:3′,1″-terphenyl]-4,4″-diol, and5′-(5-(4-hydroxyphenyl)bicyclo[2.2.1]heptan-2-yl)-3,3″-dimethyl-[1,1′:3′,1″-terphenyl]-4,4″-diol.

And still further,4,4′″,4″′-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(methanetriyl)tetrakis(2-methylphenol),4,4′″,4′″-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(methanetriyl)tetrakis(2-cyclohexyl-5-methylphenol),4,4′″,4″-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(methanetriyl)tetrakis(2-isopropylphenol),4,4′″,4″′-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(methanetriyl)tetrakis(2,5-dimethylphenol),4,4′″, 4″-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2,2-triyl))tetrakis(2-methylphenol),4,4′-(5-(4-(5-(5-cyclohexyl-4-hydroxy-2-methylphenyl)-5-(3-cyclohexyl-4-hydroxyphenyl)bicyclo[2.2.1]heptan-2-yl)phenyl)bicyclo[2.2.1]heptane-2,2-diyl)bis(2-cyclohexyl-5-methylphenol),4,4′″, 4″′-(5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptane-5,2,2-triyl))tetrakis(2,5-dimethylphenol), and5′-(5-(bis(4-hydroxy-2,5-dimethylphenyl)methyl)bicyclo[2.2.1]heptan-2-yl)-3,3″-dimethyl-[1,1′:3′,1″-terphenyl]-4,4″-diol.

In some NBane-type ballast embodiments of the present invention thenorbornane-type compound encompasses one of norbornane-type structuresCC, shown below:

where Z′ represents an arylol or other aromatic substituent covalentlybonded as shown, and where W** is inclusive of the definition of W* andcan further be one or more additional aromatic substituents which, ifpresent, are covalently bonded to another norbornane ring carbon or toan alkyl substituent covalently bonded to another norbornane ringcarbon.

In some norbornane-type arylol embodiments of the present invention eachnorbornane-type moiety is represented by the structure below:

where X is one of CH₂—CH₂ or O.

In some norbornane-type compound embodiments in accordance with thepresent invention where the norbornane compound is represented by one ofstructures AA, BB or any of structures CC, the groups represented by Zand Z′ are independently, covalently bonded, as represented by one ormore of structures A, B, C, D or E, below, where C*** represents acarbon atom of a norbornane ring and Q represents from one to fivesubstituents independently selected from —OH, a halogen, a C₁ to C₆alkyl group, a C₃ to C₁₂ cycloalkyl group, an aryl and an alkaryl group,n is from 0 to 4, and with the provisos that at least one of suchsubstituents is —OH, and that the total number of such arylolsubstituents is an odd number:

In some norbornane-type compound embodiments in accordance with thepresent invention where the norbornane compound is represented bystructure AA, W, if not a covalent bond, is selected from one of thefollowing structures:

where p is an integer from 1 to 10, q is an integer from 1 to 3; y is 1or 2, R is hydrogen or a C₁ to C₄ alkyl and A is selected from O, C(O),CH₂, C(CH₃), C(CF₃)₂ or SO₂.

In some norbornane-type compound embodiments in accordance with thepresent invention the norbornane-type compound is selected from thefollowing moieties:

where Z is as defined above and represents either one or threesubstituted or unsubstituted arylol substituents, m is from 1 to 30 andT is either hydrogen or a residual from a chain transfer agent.

In still other NBane-type ballast embodiments of the present invention,such norbornane-type compound is selected, from one of the following:

It should be realized that the NBane-type moieties in accordance withthe NBane-type ballast embodiments of the present invention are, asprevious described above, converted to PACs in accordance with theteachings of the aforementioned '131 patent, and that such PACs are usedto form photosensitive resin composition embodiments in accordance withthe present invention, where the resin component of such compositionsone of a polybenzoxazole resin or a polynorbornene-type resin as aredescribed hereinafter. Further still, it will be understood thatembodiments in accordance with the present invention encompass the filmsand structures formed by such photosensitive resin compositionembodiments where such compositions incorporate a PAC formed from aNBane-type arylol (or NBane-type ballast) as are described herein.

Exemplary PAC embodiments in accordance with the present invention willbe described more fully below, but such embodiments include, but are notlimited to, the following structures, where OD is either a hydroxylgroup or a sulfonic acid ester:

NBane-Type Ballast Precursors

Examples A and B are provided to illustrate methods useful for thepreparation of NBane-type ballast Precursor moieties. Such examples arenon-limiting; Serving only to assist in understanding some of theembodiments in accordance with the present invention.

EXAMPLE A 5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptan-2-one)

1,4-Diiodobenzene (60.0 g, 0.182 mol)), (tris-o-tolylphosphine)₂PdCl₂(1.44 g; 1.83 mmol), and bicyclo[2.2.1]hepta-2-ene-5-one (59.3 g, 0.55mol) were charged to an appropriately sized and equipped reaction vesselunder nitrogen. DMF (600 mL) was added to this mixture. Triethylamine(152 mL, 1.09 mol) (the temperature dropped to 16° C.) and formic acid(98%) (34 mL, 0.90 mol) (the temperature rose to 34° C.) were added tothis reaction mixture successively. The reaction mixture was heatedslowly to 70° C. in an oil bath. The reaction initiated and thetemperature of the mixture rose to 102° C. Almost immediately, themixture turned from yellow to orange and gas evolution was observed. Thereaction mixture was stirred overnight at 70° C. temperature. At the endof this reaction time, the reaction mixture was yellow and the presenceof palladium metal was observed. The hot reaction mixture was filteredthrough a silica gel plug and a white solid formed as the filtratecooled. This solid was collected by filtration (10.6 g). Next, about 15%of solvent was evaporated from this filtrate which caused an additionalamount of product to precipitate from solution at room temperature (4.5g). Both of the samples were 99% pure by GC (15.1 g 28% yield).

EXAMPLE B 6-Phenylnorbornane-2-carboxaldehyde and5-phenylnorbornane-2-carboxaldehyde

Bis(tri-o-tolylphosphine)palladium dichloride (3.9 g, 5.0 mmol)) wascharged to an appropriately sized and equipped reaction vessel undernitrogen. Iodobenzene (117.5 g, 0.576 mol),endo-,exo-norbornene-2-carboxaldehyde (56.3 g, 0.46 mol), 530 mldimethylformamide (DMF), and triethylamine (139.1 g, 1.38 mol) wereadded. The mixture was stirred as formic acid (53.0 g, 1.15 mol) wasadded dropwise within 11 minutes. The reaction temperature rose from 18°C. to 42° C. Heating was commenced. At 51° C., an exothermic reactionbegan. The temperature quickly climbed to 104° C. within 14 minuteswhile the reaction went to reflux. The reaction mixture color changedfrom bright yellow to orange to black. GC analysis after 20 minutesreaction time showed all norbornenecarboxaldehyde had been consumed. Thereaction mixture was poured into 2500 ml distilled water. The aqueousmixture was extracted with 3×500 ml MTBE. The extracts were filteredthrough a Celite pad to remove palladium particles. The MTBE extractswere washed with 8×500 ml 5% aqueous LiCl to remove DMF. The MTBEsolution was dried over sodium sulfate, filtered, and rotary evaporatedto give 92.3 g brown liquid, 88.2% purity by GC analysis. NMR analysisshowed four CHO signals.

The oil was dissolved in dichloromethane and adsorbed onto 120 g silicaby rotary evaporation of the mixture to dryness. This was dry loadedonto on 1280 g silica and eluted with 2-2.5 L portions of solvent with agradient starting at 100% heptane and going to 1% EtOAc/heptane.Fractions 17-25 (with 1% EtOAc/heptane) yielded 66 g oil with 96.5% (GC)purity. NMR analysis showed only three CHO signals. The oil was vacuumdistilled through 10-inch glass helix-packed column. A forerun of 8.27 gwith 98.6% purity was collected at 117.0-123.8° C. (1.20-1.30 Torr).Three fractions, totaling 50.91 g (55% yield) were collected at112.3-118.7° C. (1.05-1.30 Torr). Purity was 99.4-99.7% by GC.

It should be understood, in view of the above experimental details andresult, that the palladium catalyzed hydroarylation of singlysubstituted 2-norbornenes, such as the endo-/exo-2-NBCHO above, by ahaloaryl (e.g., iodobenzene) or a haloarylol (e.g., BrPhOH) leads to thefour regioisomers depicted in the above reaction scheme. The addition ofthe phenyl group exemplified herein occurs either syn- to the exo orendo functional group or anti- to the exo- or endo-functional group, butalways on the exo-face of the double bond to yield the particularregioisomers shown. Thus, hydroarylation is a useful method forgenerating mixtures of regioisomers having exo-aryl (or arylol)functionality in order to control the physical properties (i.e., meltingpoint or solubility in processing solvents and formulations) of anorbornane derived phenol, polyphenol, or PAC in accordance withembodiments in accordance with the present invention.

Norbornane Ballast Synthesis

In each of Examples 1-14, provided below, a synthetic route to the namedNBane-type ballast moiety is provided. It will be understood suchexamples are non-limiting and are provided both as illustrations of theseveral synthetic routes available for the preparation of NBane-typeballast moieties and to assist in the understanding of some of theembodiments in accordance with the present invention.

EXAMPLE 14,4′-(5-(4-(5,5-bis(4-hydroxy-3-methylphenyl)bicyclo[2.2.1]heptan-2-yl)phenyl)bicyclo[2.2.1]heptane-2,2-diyl)bis(2-methylphenol) (PP691)

o-Cresol (200 mL, 1.93 mol),5,5′-(1,4-phenylene)bis(bicyclo[2.2.1]heptan-2-one) (15.1 g; 51.2 mmol)and dodecane-1-thiol (catalyst) (0.365 g; 1.80 mmol) were charged to anappropriately sized and equipped reaction vessel. The mixture was heatedto 40° C. in an oil bath and hydrogen chloride (HCl) gas was bubbledthrough the reaction mixture. The reaction was continued at 40° C. forovernight (16 hours) in the presence of the HCl gas. After this time, apink colored precipitation had formed in the vessel and the reaction wasended by stopping the flow of HCl gas. About one liter of hexanes wasadded to the reaction mixture and the reaction mixture filtered to yielda pink powder (˜110 grams). The pink powder was extracted with toluene(500 mL) to remove o-cresol and the pink powder was then dissolved indiethyl ether and the solution was passed through a plug of silica gel.After evaporation of the diethyl ether, a red viscous oil was obtained.This material was triturated with hexanes to generate a pink precipitatewhich was then dissolved in methanol and extracted three times with amixture of hexanes and heptanes. Evaporation of the methanol yielded 37g of a solid product (light pink) that was triturated with 100 mLtoluene, collected by filtration, and then dried under vacuum. Theidentity of the product as PP691 was confirmed by ESI-MS and proton NMR.Yield of PP691 product was 36.7 g at 95% purity.

EXAMPLE 24,4′-((5-(4-(5-(bis(4-hydroxy-3-methylphenyl)methyl)bicyclo[2.2.1]heptan-2-yl)phenyl)bicyclo[2.2.1]heptan-2-yl)methylene)bis(2-methylphenol) (PP719)

1,4-Diiodobenzene (7.51 g; 22.8 mmol), (tris-o-tolylphosphine)₂PdCl₂(0.713 g, 0.907 mmol),4,4′-(bicyclo[2.2.1]hept-5-en-2-ylmethylene)bis(2-methylphenol) (21.8 g;68.0 mmol) and DMF (100 mL) were weighed and charged to an appropriatelysized reaction vessel equipped with stirring and a reflux condenser andplaced under a nitrogen atmosphere. Triethylamine (19.0 mL, 136 mmol)and formic acid (4.40 mL, 117 mmol) were then added with stirring tothis mixture. The mixture was heated to 75° C. using an oil bath. Duringthe course of heating the mixture changed from yellow to orange andbecame clear. The temperature of the reaction mixture rose to 119° C.due to the exotherm of the reaction and the solution became darker, withgas evolution. The reaction mixture was allowed to stir overnight (16hours) at 75° C. in the oil bath. The reaction mixture obtained was aclear yellow solution with black palladium particles present. Thereaction mixture was diluted with ethyl acetate (100 ml) and filteredthrough a silica gel plug. The filtrate was washed with water and theorganic layer obtained was dried over anhydrous MgSO₄. The crude mixturewas purified with medium pressure column chromatography and the elutingsolution was gradually changed from 100% hexanes to 100% ethyl acetate.This separation resulted in the isolation of 9.5 g of the PP719 (60%yield; 95% purity). The identity of the product was confirmed by asPP719 by LC-MS (ES1) and proton NMR.

EXAMPLE 34,4′4(5-(4-hydroxy-3-methylphenyl)bicyclo[2.2.1]heptan-2-yl)methylene)bis(2-methylphenol) (PP429)

Under a nitrogen atmosphere, 4-Bromo-2-methylphenol (4.69 g, 25.1 mmol),(tris-o-tolylphosphine)₂PdCl₂ (0.377 g; 0.480 mmol), and4,4′-(bicyclo[2.2.1]hept-5-en-2-ylmethylene)bis(2-methylphenol) (5.14 g;16.0 mmol) were charged to an appropriately sized and equipped reactionvessel. DMF (80 mL) was added to this reactant mixture to give asuspension. Triethylamine (11.0 mL, 78.9 mmol) and formic acid (2.30 mL,60.9 mmol) were added to this suspension and then heated to 75° C. in anoil bath. The reaction mixture turned from its original orangesuspension to pale yellow and became clear. During, the course of thereaction, the temperature of the reaction mixture rose to 82° C. andturned darker, and a gas evolved very slowly. After the initialexothermic reaction ceased, the reaction mixture was stirred overnightat 75° C. After this time, the reaction mixture was a clear, pale yellowsolution with black particles. The cooled reaction mixture was dilutedwith ethyl acetate (80 mL) and washed with water (160 mL) to remove DMF.The organic layer was dried over anhydrous MgSO₄. The crude mixture waspurified by preparative TLC using a hexanes/ethyl acetate mixture(50:50) as developer to afford 3.7 g of4,4′-((5-(4-hydroxy-3-methylphenyl)bicyclo[2.2.1]heptan-2-yl)methylene)-bis(2-methylphenol)(54% yield). The identity of the product as PP429 was confirmed by LC-MS(ESI) and proton NMR.

EXAMPLE 4 Synthesis of 4-(bicyclo[2.2.1]heptan-2-yl)-2-methylphenol(PP202)

4-Bromo-2-methylphenol (3.54 grams, 19.0 mmol),(tris-o-tolylphosphine)₂PdCl₂ (0.291 gram, 0.370 mmol), and norbornylene(1.62 grams, 17.2 mmol) were charged to an appropriately sized andequipped reaction vessel under nitrogen. DMF (70 mL) was added to thisreaction mixture to form a suspension and then triethylamine (5.66grams, 56.0 mmol) and formic acid (2.20 grams, 47.7 mmol) were added.After the addition of the formic acid, the temperature of the what wasobserved to be a yellow suspension reaction mixture rose up to about 32°C. As the mixture was heated to 75° C. in an oil bath, the suspensionturned dark at about 72° C. The reaction mixture was then allowed tostir overnight with the reaction vessel immersed in the 75° C. oil bath.After cooling the reaction mixture was a yellowish clear solution withblack particles. The mixture was diluted with ethyl acetate, filteredthrough a silica gel plug and washed with water. The organic layer wasseparated and dried over anhydrous MgSO₄. The product solution wasstripped down by rotary evaporation to afford an oil. PP202,(4-(bicyclo[2.2.1]heptan-2-yl)-2-methylphenol) was confirmed by GC-MSanalysis of the crude product. (46% yield).

EXAMPLE 5 4,4′-(bicyclo[2.2.1]heptane-2,5-diyl)bis(2-methylphenol)(PP308)

4-Bromo-2-methylphenol (2.03 grams, 10.8 mmol),(tris-o-tolylphosphine)₂PdCl₂ (0.0422 gram, 0.0537 mmol), andnorbornadiene (0.257 gram, 2.79 mmol) were charged to an appropriatelysized and equipped reaction vessel under nitrogen. DMF (36 mL),triethylamine and formic acid were added to what was observed to be ayellow suspension. The mixture was then heated to 75° C. in an oil bath.Upon such heating, the reaction mixture became a yellow solution, blackparticles appeared and a very slow evolution of gas was observed. Thereaction mixture was stirred overnight at this temperature. Aftercooling, the reaction mixture was diluted with ethyl acetate and washedwith water. The organic layer was separated and dried over anhydrousMgSO₄. PP308-2, 5,(4,4′-(Bicyclo[2.2.1]heptane-2,5-diyl)bis(2-methylphenol)) was confirmedby GC-MS of the crude product (43% yield).

Example 6 4-((3-hydroxy-4-methylphenyl)(5-phenylbicyclo[2.2.1]heptan-2-yl)methyl)-2-methylphenol (PP398)

A mixture of endo-, exo-6-Phenylnorbornane-2-carboxaldehyde and endo-,exo-5-phenylnorbornane-2-carboxaldehyde 39.87 g, 0.20 mol) were chargedto an appropriately sized and equipped reaction vessel. o-Cresol (275 g,2.54 mol) was added and the vessel heated in a 75° C. oil bath. When thereaction mixture reached 25° C., 1-dodecanethiol (4.8 ml) was syringedinto the reaction mixture and when the temperature of the mixturereached 50° C., HCl gas slowly bubbled into the reaction mixture. Themixture immediately became pink-colored and then warmed to about 75° C.within 10 minutes, at which time an aliquot was removed and analyzed byHPLC. The analysis indicated that all of the aldehydes had beenconsumed. The HCl addition and heating were stopped. A total of 1.8 gHCl had been added.

The reaction mixture was then poured into 1000 ml of distilled water andthe resulting phases separated. The aqueous phase was extracted with 500ml dichloromethane and the organic portions were combined and washedwith 500 ml portions of brine to pH 7. After drying over sodium sulfate,the organic solution was filtered and the solvents removed by rotaryevaporation to obtain 307.2 g of an oil. HPLC analysis showed 82.4%o-cresol and 15.1% PP398. The oil was rotary evaporated at 0.87-1.05Torr and 65-75° C. to remove 197 g o-cresol and leave 100.3 g of a lightviolet syrup. HPLC analysis found 32.2% o-cresol, 64.1% PP398 isomers,and 3.3% higher retention time byproducts. Further rotary evaporationunder high vacuum removed about 3 g of residual o-cresol.

The syrup was dissolved in dichloromethane to which 253 g silica wasadded. The resulting slurry was then rotary evaporated to dryness. Thedried silica was then dry loaded onto 1240 g of silica and eluted with asolvent gradient commencing with 100% heptane and going to 100%dichloromethane. With 50:50 dichloromethane/heptane, o-cresol wasremoved. At 100% dichloromethane, the following combined fractions wereobtained:

1 18.44 g white crystals 95.6% 3 isomers 2 57.70 g white crystals 99.3%3 isomers 73% yield 3  0.65 g white powder 97.2% 3 isomers

Fraction 2 was taken as pure product. Fractions 1 and 3 were combinedwith 18 g of 95.9-97.5% purity material from an earlier run and elutedwith a heptane/dichloromethane gradient through 800 g silica. Thisyielded an additional 5.74 g of 99.1% PP398 isomers.

EXAMPLE 7 4,4′-(bicyclo[2.2.1]heptane-2,2-diyl)bis(2-methylphenol)

An appropriately sized and equipped reaction vessel was charged witho-cresol (44 g, 0.406 mol) in 10 mL MeOH and 1-dodecanethiol (1.09 mL,0.0045 mol). The mixture was heated to 40° C. and the addition funnelwas charged with 2-norbornanone (5 g, 0.045 mol) in 5 mL MeOH ando-cresol (5 g, 0.046 mol) in 5 mL MeOH. The o-cresol solution was addeddropwise at 40° C. over 45 min, while introducing HCl gas understirring. After addition, the HCl gas was bubbled for another 45 min andwhite precipitate was observed and color turns to light pink from darkorange. The reaction mixture was stirred for another 17 h at 40° C., GCanalysis showed no starting material 2-norbornanone. The mixture wascooled to room temperature and removed MeOH using rotary evaporator anddiluted with 50 mL CH₂Cl₂. Filter the white precipitate and washed with(3×50 mL) CH₂Cl₂ and dried under vacuum for 6 h gave 10.5 g (75% yield)of product as white solid with >99.9% purity by HPLC. ¹HNMR, ¹³CNMR andMS were consistent with the structure.

EXAMPLE 8 2-methyl-4-{6-{[2-(2 methoxyethoxy)-ethoxy]methyl}bicyclo[2.2.1]heptan-2-yl}phenol (P334)

An appropriately sized and equipped reaction vessel was charged with9.13 g 4-iodo-2-methylphenol (IMePhOH, 0.039 mol), 8.83 g5-[2-(2-methoxyethoxy)ethoxy]methyl}bicyclo[2.2.1]hept-2-ene (TONNB)(0.039 mol), 0.27 g Pd(Ph₃P)₂Cl₂ (3.9 mmol, 1 mol %), 11.82 gtriethylamine (0.117 mol), and 60 ml dimethylformamide (DMF). Themixture was magnetically stirred to give an orange-brown slurry. Formicacid (4.49 g, 0.0975 mol) was added quickly by pipette. The temperaturerose from 19° C. to 34° C. and the reaction mixture became a lightorange solution. External heating was started. After 15 minutes and at70° C., GC analysis showed 35.1% IMePhOH, 63.1% TONNB, and 1.5% total of4 isomers of P334 (TONNB-cresol). At 70° C., an exotherm caused thereaction temperature to rise to 82° C. with evolution of CO₂ and thesolution became bright yellow. After approximately two hours, thereaction mixture had become olive and black Pd particles hadprecipitated. GC analysis showed no IMePhOH, 1.5% TONNB, and 94.2% P334(4 isomers). The reaction mixture was then cooled to 34° C., but thenreheated up to 82° C. for 24 min to ensure that all IMePhOH had beenconsumed. The reaction was cooled to 70° C., filtered through Celite®filtering aid to remove the Pd particles, and rinsed with ˜50 ml MTBE.The filtrate was treated with 100 ml distilled water and then acidifiedwith 10 ml 3.5N HCl to bring the pH to 5. The phases were separated andthe aqueous phase extracted with 3×50 ml MTBE. The MTBE washings andorganic portions were combined and washed with 3×40 ml 5% aqueous LiBr.The LiBr washes gave pH from 3 to 2. The organic phase was washed with50 ml brine until a pH of 3 was obtained and then dried over sodiumsulfate, filtered, and solvent removed by rotary evaporation to yield12.4 g of a light brown oil. GC analysis found 1.2% TONNB and 96.1% P334having an isomer ratio of 34:12:44:10.

The P334 was dissolved in heptane and dichloromethane, mixed with 38 gsilica, and solvents removed rotary evaporation until a dry powder wasobtained. The powder was loaded onto 320 g silica and elution wasstarted using 100% heptane. TONNB and other significant impurities wereeluted with the solvent gradient between 100% heptane to 20%EtOAc/heptane. TONNB-cresol eluted with 30% EtOAc/heptane to give 10.2 g(78% yield) colorless oil. GC analysis gave 100% purity. Isomer ratiowas 35:12:43:10. Data: GC analysis done on a DB5 column: 30 m, 0.32 mmID, 0.25 μm film. Gradient: 75° C. to 200° C. @ 15° C./min., then heat @40° C./min to 300° C. Injector: 250° C. Detector: 350° C. (FID),Retention time: 8.244 min (IMePhOH), 9.199 min (TONNB), 14.036 min,14.209 min, 14.555 min, 14.465 min. (TONNB-cresol isomers). TLC analysison silica gel with 50% EtOAc/heptane.

EXAMPLE 9 2-methyl-4-{6-nonylbicyclo[2.2.1]heptan-2-yl}phenol (P343)

An appropriately sized and equipped reaction vessel was charged with11.70 g 4-iodo-2-methylphenol (IMePhOH, 0.05 mol), 11.70 g2-decylnorbornene (DecNB, 0.05 mol), 0.35 g Pd(Ph₃P)₂Cl₂ (5 mmol, 1 mol%), 15.15 g triethylamine (0.15 mol), and 58 ml dimethylformamide. Themixture was magnetically stirred to give a tan slurry and formic acid(5.75 g, 0.125 mol) was added quickly by pipette. The temperature rosefrom 21° C. to 37° C. and the reaction mixture became an orangesolution. External heating was applied. At 56° C., an exothermcommenced, causing the temperature to rise to 67° C. with evolution ofCO₂ and the solution became yellow. After approximately 7 hours at 70°C., a sample quench (about 0.5 ml of reaction mixture into 1 ml water)was analyzed to show ˜0% IMePhOH, 3.9% DecNB, and 92.5% P343 (4isomers). The reaction mixture was cooled to 47° C., filtered throughCelite® filtering aid to remove the Pd particles, and rinsed with ˜50 mlMTBE. The filtrate was treated with 100 ml distilled water and thenacidified with 10 ml 3.5N HCl to pH 4. The phases were separated and theaqueous phase extracted with 4×30 ml MTBE. The MTBE and organic portionswere combined and washed with 3×40 ml 5% aqueous LiBr. The LiBr washesgave pH=10. The organic phase was then dried over sodium sulfateovernight, filtered, and the solvent removed by rotary evaporation toyield 16.32 g oil. GC analysis found 4.2% DecNB and 89.2% P343 with anisomer ratio of 28:12:48:12.

The P343 was then dissolved in heptane, mixed with 35 g silica, and theslurry rotary evaporated to a dry powder. The powder was loaded onto 381g silica and the P343 eluted with first 100% heptane and then mixturesof EtOAc/heptane. The several fractions where combined in pentane andthen the solvent removed by rotary evaporation to give 9.83 g (57%) of99.7% P343 with an isomer ratio of 33:13:44:10.

EXAMPLE 104,4′-((oxybis(ethane-2,1-diyl))bis(bicyclo[2.2.1]heptane-5,2-diyl))bis(2-methylphenol)(PP 475)

An appropriately sized and equipped reaction vessel was charged with4-iodo-2-methylphenol (75.7 g, 323 mmol) in 380 mL DMF. To that wasadded Pd(PPh₃)₄ (3.56 g, 3.08 mmol) at room temperature giving a lightyellow solution. Then,5,5′-(oxybis(ethane-2,1-diyl))bis(bicyclo[2.2.1]hept-2-ene) (39.8 g, 154mmol), 100 ml dimethylformamide (DMF), and triethylamine (65 mL, 462mmol) were added and the mixture stirred as formic acid (17.7 g, 14.5 mL385 mmol) was added drop wise within 5 minutes. The reaction temperaturerose from 20° C. to 25° C. after which external heating was applied. At70° C., an exothermic reaction began and the temperature quickly climbedto 82° C. within 10 minutes accompanied by color changes from lightyellow to orange to black. The reaction was monitored by GC and afterstirring at 75° C. for 96 h an aliquot GC indicated the reaction wascomplete. The reaction mixture was allowed to cool to room temperatureand was poured into 2000 mL distilled water. The aqueous mixture wasextracted with (3×1500 mL) MTBE, the extracts were filtered through aCelite® filtering aid pad to remove palladium particles and then washedwith (2×1 L) water, (2×1 L) brine and (2×1 L) 5% aqueous LiCl to removeresidual DMF. The resulting MTBE solution was dried over sodium sulfate,filtered, and the solvent rotary evaporated to give 94 g of a brownliquid. The 94 g of crude PP475 was adsorbed onto 120 g silica andchromatographed over an additional 1 kg of silica eluting withheptane-EtOAc mixtures. The concentrated purified fractions yielded 43 g(59% yield) of PP475 as a clear viscous oil with >98.0% purity by NMR.NMR and MS were consistent with the desired structure.

EXAMPLE 114-((3-hydroxy-4-methylphenyl)(5-phenylbicyclo[2.2.1]heptan-2-yl)methyl)-2-methylphenol(PP400)

PhNBaneCHO: Bis(tri-o-tolylphosphine)palladium chloride (3.9 g, 5.0mmol)) was charged to an appropriately sized and equipped reactionvessel. Iodobenzene (117.5 g, 0.576 mol),endo-/exo-norbornene-2-carboxaldehyde (56.3 g, 0.46 mol), 530 mldimethylformamide (DMF), and triethylamine (139.1 g, 1.38 mol) wereadded and the mixture stirred as formic acid (53.0 g, 1.15 mol) wasadded drop wise over 11 minutes. The reaction temperature rose from 18°C. to 42° C. after which external heating was applied. At 51° C., anexothermic reaction began and the temperature rose to 104° C. within 14minutes while the reaction went to reflux. The reaction mixture colorchanged from bright yellow to orange to black during reflux and a GCanalysis of an aliquot taken after 20 minutes reaction time showed allnorbornenecarboxaldehyde had been consumed. The reaction mixture waspoured into 2500 ml distilled water and the aqueous mixture wasextracted with (3×500 ml) methyl-tert-butyl ether (MTBE). The extractswere filtered through a Celite® filtering aid pad to remove palladiumparticles and the extracts washed with (8×500 ml) 5% aqueous LiCl toremove residual DMF. The MTBE phase was separated and then dried oversodium sulfate, filtered, and rotary evaporated to give 92.3 g of abrown liquid, 88.2% purity by GC analysis. NMR analysis showed four CHOsignals.

The oil was dissolved in dichloromethane and adsorbed onto 120 g silicaby rotary evaporation of the mixture to dryness. This was dry loadedonto 1280 g silica and eluted with 2-2.5 L portions of solvent with agradient starting at 100% heptane and going to 1% EtOAc/heptane.Fractions 17-25 (with 1% EtOAc/heptane) yielded 66 g oil with 96.5% (GC)purity. NMR analysis showed only three CHO signals. The oil was vacuumdistilled through 10-inch glass helix-packed column. A forerun of 8.27 gwith 98.6% purity was collected at 117-124° C. (1.20-1.30 Torr). Threefractions, totaling 50.91 g (55% yield) were collected at 1129-119° C.(1.05-1.30 Torr). Purity was 99.4-99.7% by GC. Data: GC analysis done ona EC5 column: 30 m, 0.32 mm ID, 0.25 μm film. Gradient: 75° C. to 200°C. @ 15° C./min., then heat @ 40° C./min to 300° C. Injector: 250° C.Detector: 350° C. (F1D), Retention time: 10.450 and 10.646 minutes.

PhNBaneCH(C₆H₂-2,5-Me₂-OH)₂: An appropriately sized and equippedreaction vessel was charged with 2,5-dimethylphenol (22.6 g, 185 mmol)in 45 mL MeOH and 1-dodecanethiol (1.3 mL, 5.5 mmol). A slight endothermwas observed (18° C. to 5° C.). An addition funnel was charged withPh-NBaneCHO (11 g, 54.9 mmol) in 10 mL MeOH and 2,5-dimethylphenol (11g, 90 mmol) in 10 mL MeOH and then the solution was added drop wise overa 30 minute period, while introducing HCl gas under stirring. During theaddition, the reaction temperature rose to 50° C. After addition, theHCl gas was bubbled for another 1 h and the reaction mixture turned fromclear to light blue. The reaction mixture was stirred for another 3 h at50° C., GC analysis showed no starting material Ph-NBaneCHO. The mixturewas cooled to room temperature and MeOH was removed under rotavap togive a blue oil. The crude blue oil was dissolved in 200 mL EtOAc andwashed with water and brine. The organic phase was dried over sodiumsulfate, filtered and concentrated to give 48 g crude product as a blueoil. The 48 g crude product was further purified via Kugelrohrdistillation (100-120° C. oven temperature, 0.1-0.4 Torr high vacuum) togive 31.3 g product as a light blue solid. The 31.3 g material wastriturated with 100 mL DCM and filtered to give 7.5 g (32% yield)product with 99.7% purity by HPLC. The filtrates were concentrated andgave an additional 26.1 g of crude product which was also subjected toKugelrohr distillation (110-150° C. Oven temperature, 0.6-0.8 Torr highvacuum) to give 19.3 g product as an off-white solid. The 19.3 g ofcrude product was adsorbed onto 20 g of silica and chromatographed overand additional 120 g of silica eluting with heptane/EtOAc mixtures. Theconcentrated purified fractions yielded 12.2 g (52% yield) of product asan off-white powder with >99.9% purity by HPLC. The combined yield forthis reaction was 84%. NMR and MS were consistent with the structure.

EXAMPLE 123-(bicyclo[2.2.1]heptan-2-yl(4-hydroxy-2,5-dimethylphenyl)methyl)-2,5-dimethylphenol(PP350)

NBCH(C₆H₂-2,5-Me₂-OH)₂ An appropriately sized and equipped reactionvessel was charged with KOH (4.6 g, 81.8 mmol) in 50 mL MeOH. Themixture was heated to 65-66° C. and 2,5-dimethylphenol (20 g, 163.7mmol) dissolved in 20 mL MeOH was added at 66° C. An addition funnel wasthen charged with exo-/endo-NBCHO (10 g, 81.8 mmol) in 10 mL MeOH. Afterslow addition of the NBCHO solution the reaction mixture was refluxedand monitored by TLC and HPLC. No significant exotherm was observedduring addition of aldehyde solution and the color of the reactionmixture change from light yellow to dark brown. The reaction wasmonitored periodically by taking an aliquot and quenching with 1N HClsolution and extracting with EtOAc and checking TLC/HPLC. After 7 daysreflux all aldehyde was consumed, but, unreacted phenol was observed byTLC/HPLC and crude LCMS indicated >89% product with ˜10% unreactedphenol. The reaction mixture was allowed to cool to room temperature andacidified with 4N HCl and diluted with 200 mL CH₂Cl₂. A KCl precipitatewas filtered and the filtrate concentrated to give 33.5 g crude productas a brown paste. The 33.5 g crude product was dissolved in 500 mL EtOAcand washed with water, brine, dried over Na₂SO₄, filtered andconcentrated to give 32.7 g crude product.

The 32.7 g of crude product was adsorbed onto 33 g silica andchromatographed over an additional 330 g of silica eluting with heptane(1 L), 5% EtOAc in heptane (8 L), 7% EtOAc in heptane (10 L), 10% EtOAcin heptane (6 L), 12% EtOAc in heptane (4 L), 15% EtOAc in heptane (2 L)and 20% EtOAc in heptane (2 L). The concentrated purified fractionsyielded 13.2 g of product as a light yellow solid, which was furtherpurified by recrystallization from hot toluene to give 10.7 g (37.5%yield) product with 98.7% purity by HPLC. NMR and MS were consistentwith the desired structure.

NBaneCH(C₆H₂-2,5-Me₂-OH)₂ A 250 mL glass Parr pressure bottle wascharged with 10.7 g (30.7 mmol) of NBCH(C₆H₂-2,5-Me₂-OH)₂ in 60 mLEtOAc. Then 654 mg (0.307 mmol) 10% Pd/C (50% wet) was added under N2blanket. The reaction mixture was flushed with N₂ two times and chargedwith H₂ at 35 psi and agitated on the Parr shaker for 3 h at roomtemperature. The reaction mixture was flushed with N₂ and filteredthrough a pad of celite and MgSO₄. The filtrate was concentrated anddried under high vacuum to give 10.65 g (98.9% yield) product as a whitepowder with 99.4% purity by HPLC. MS and NMR were consistent with thedesired structure. The melting point of the product was 192-194° C.

EXAMPLE 134-(5-(4-(6-(4-hydroxy-3-methylphenyl)bicyclo[2.2.1]heptan-2-yl)butyl)bicyclo[2.2.1]heptan-2-yl)-2-methylphenol)

An appropriately sized and equipped reaction vessel was charged with4-iodo-2-methylphenol (10.14 g, 43.3 mmol) in 40 mL DMF under nitrogenand then Pd(PPh₃)₄ (477 mg, 0.412 mmol) was added at room temperaturegiving a light yellow solution. Then, NB(CH₂)₄NB (5 g, 20.6 mmol), 25 mldimethylformamide (DMF), and triethylamine (10 mL, 72.2 mmol) wereadded. The mixture was stirred as formic acid (2.37 g, 1.94 mL 51.6mmol) was added dropwise over 5 minutes. The reaction temperature rosefrom 20° C. to 25° C. after which external heating was applied. At 70°C., an exothermic reaction began and the temperature climbed to 85° C.within 10 minutes. The reaction mixture changed color from light yellowto orange to black. The reaction was monitored by GC and after stirringat 75° C. for 72 h an aliquot analyzed by GC indicated the reaction wascomplete.

The reaction mixture was allowed to cool to room temperature and waspoured into 100 mL distilled water. The aqueous mixture was extractedwith (3×300 mL) MTBE and the combined extracts were filtered through aCelite pad to remove palladium particles. The extracts were then washedwith water, brine and 5% aqueous LiCl to remove residual DMF. The MTBEsolution was then dried over sodium sulfate, filtered, and rotaryevaporated to give 13.1 g of a brown liquid. The 13.1 g of crude productwas adsorbed onto 13 g of silica and chromatographed over an additional130 g of silica eluting with heptane/EtOAc mixtures. The concentratedpurified fractions yielded 4.6 g (49% yield) of product as a clearviscous oil with >98.0% purity by NMR. NMR and MS were consistent withthe desired structure.

EXAMPLE 145-(6-(2-hydroxy-3-methylphenyl)decahydro-1,4:5,8-dimethanonaphthalen-2-yl)-2-methylphenol(PP375)

An appropriately sized and equipped reaction vessel was charged with4-bromo-2-methylphenol (2.5 g, 13.2 mmol) in 13 mL DMF and thenPd(P(o-tolyl)₃)₂)Cl₂ (110.3 mg, 0.12 mmol) was added at room temperaturegiving a light yellow solution. Then, TDD (1 g, 6.3 mmol), 6 mldimethylformamide (DMF), and triethylamine (2.65 mL, 18.95 mmol) wereadded. The mixture was stirred as formic acid (727 mg, 0.6 mL 15.8 mmol)was added dropwise over 5 minutes. The reaction temperature rose from20° C. to 25° C. after which external heating was applied. At 70° C., anexothermic reaction began. The temperature rose to 80° C. within 10minutes and the reaction mixture changed color from light yellow toorange to brown. The reaction was monitored by GC and after stirring at75° C. for 96 h an aliquot analyzed by GC indicated the reaction wascomplete.

The reaction mixture was allowed to cool to room temperature and waspoured into 50 mL distilled water. The aqueous mixture was extractedwith MTBE and the combined extracts filtered through a Celite pad toremove palladium particles. The MTBE extracts were then washed withwater, brine and 5% aqueous LiCl to remove residual DMF. The MTBEsolution was then dried over sodium sulfate, filtered, and rotaryevaporated to give 2 g of a brown liquid. The 2 g of crude product wasadsorbed onto 2 g of silica and chromatographed over an additional 20 gof silica eluting with pentane/EtOAc mixtures. The concentrated purifiedfractions yielded 600 mg (25% yield) of product as a clear viscous oilwith >98% purity by NMR. NMR and MS were consistent with the desiredstructure.

PAC Synthesis

As previously mentioned, the NBane-type PAC material embodiments inaccordance with the present invention are prepared by converting ananalogous NBane-type arylol moiety to the PAC form by reaction thearylol with one of the following sulfonic acids or their respective acidchlorides:

-   1,2-naphthoquinone-2-diazido-5-sulfonic acid,-   1,2-naphthoquinone-2-diazido-4-sulfonic acid or-   2-diazo-4-hydrosulfonylcyclohex-3-enone, the structures of which are    shown, respectively below, to form the esters thereof:

While generally a particular level of DNQ substitution is targeted forsuch conversions, the selection of reagents and reaction conditions, asillustrated in PAC formation examples below.

EXAMPLE PAC-1 (Q-1) PP691 PAC 88% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with4.75 g (0.0069 mol) of PP691 and 6.50 g (0.024 mol) of1,2-naphoquinone-diazide-4-sulfonylchloride and 63.75 g of acetone. Themixture was stirred to produce a uniform solution and cooled to roomtemperature with continued stirring. Next, a mixture oftriethylamine/acetone (2.69 g, 0.027 mol of triethylamine) was addedslowly to the solution while maintaining the temperature at less than35° C. The reaction mixture was stirred for an additional 3 h after theaddition of the triethylamine after which 0.36 g (0.006 mol) of aceticacid was added to quench the reaction. After stirring the mixture for anadditional 30 min., the mixture was filtered and the filtrate added to amixture of acetone/water (4 g/358 g) and this mixture allowed to stir ofan additional 1 h. The resulting precipitate was collected byfiltration, washed with water and then dried under vacuum. 8.11 g of PACshown by the following formula, an 81.3% yield, was obtained (PAC-1). Itwas found that the PAC was 13% diester, 30% trimester and 42% tetraesterby HPLC analysis. It was found that the resulted photosensitizercomprised of 15% of monoester, 43% of diester and 36% of triester byhigh performance liquid chromatography analysis. Analysis by 1H-NMRindicated the expected structure.

wherein D represents a hydrogen atom or a group shown by the followingformula of which the percentage by the weight of D is 72%, with thebalance being a hydrogen atom.

EXAMPLE PAC-2 (Q-2) PP429 PAC 88% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with2.82 g (0.0066 mol) of PP429, 4.68 g (0.0174 mol)1,2-naphthoquinone-diazide-4-sulfonylchloride and 42.50 g of acetone.After stirring the mixture to a uniform solution, the reaction solutionwas cooled by the water bath at room temperature. Then, a mixture oftriethylamine/acetone (1.94 g (0.0191 mol)/1.37 g) was slowly addeddropwise while maintaining the temperature at less than 35° C. Afterstirring for three hours at room temperature, 0.26 g (0.0044 mol) ofacetic acid was added to the reaction mixture to neutralize. Afterstirring for 30 minutes further, the reaction mixture was filtered andpoured into a mixture of pure water/acetic acid (241 g/2 g). Afterstirring for 1 hour, the resulting precipitate was collected,sufficiently washed with pure water and dried under vacuum. 5.61 g of aphotosensitizer (PAC), shown by the following formula, was obtained(yield: 85.1%, PAC-2). It was found that the resulted photosensitizercomprised of 47% of diester and 31% of triester by HPLC analysis.Analysis by 1H-NMR indicated the expected structure.

wherein D represents a hydrogen atom or the group shown in Example PAC1of which the percentage by the weight of D is 68%, with the balancebeing a hydrogen atom.

EXAMPLE PAC-3 (Q-3) PP398 88% Substitution Target

An appropriately sized and equipped reaction vessel was charged with4.50 g (0.0113 mol) of PP398, 5.35 g (0.0199 mol)1,2-naphthoquinone-diazide-4-sulfonylchloride and 55.79 g of acetone.After stirring the mixture to a uniform solution, the reaction solutionwas cooled by the water bath at room temperature. Then, a mixture oftriethylamine/acetone (2.22 g (0.0219 mol)/2.17 g) was slowly addeddropwise while maintaining the temperature at less than 35° C. Afterstirring for three hours at room temperature, 0.30 g (0.0050 mol) ofacetic acid was added to the reaction mixture to neutralize. Afterstirring for 30 minutes further, the reaction mixture was filtered andpoured into a mixture of pure water/acetic acid (313 g/3 g). Afterstirring for 1 hour, the resulting precipitate was collected,sufficiently washed with pure water and dried under vacuum. 5.24 g of aphotosensitizer (PAC), shown by the following formula, was obtained(yield: 64.7%, PAC-3). It was found that the resulted photosensitizercomprised of 22% of diester and 75% of triester by HPLC analysis.Analysis by ¹H-NMR indicated the expected structure.

wherein D represents a hydrogen atom or the group shown in Example PAC1of which the percentage by the weight of D is 86%, with the balancebeing a hydrogen atom.

EXAMPLE PAC4 TrisP-PA 88% Substitution Target

An appropriately sized and equipped reaction vessel was charged with4.19 g (0.010 mol) of TrisP-PA (Honshu Chemical Industry co.), 7.01 g(0.026 mol) 1,2-naphthoquinone-diazide-4-sulfonylchloride and 63.46 g ofacetone. After stirring the mixture to a uniform solution, the reactionsolution was cooled by the water bath at room temperature. Then, amixture of triethylamine/acetone (2.90 g (0.029 mol)/2.04 g) was slowlyadded dropwise while maintaining the temperature at less than 35 degreeC. After stirring for three hours at room temperature, 0.39 g (0.007mol) of acetic acid was added to the reaction mixture to neutralize.After stirring for 30 minutes further, the reaction mixture was filteredand poured into a mixture of pure water/acetic acid (360 g/4 g). Afterstirring for 1 hour, the resulting precipitate was collected,sufficiently washed with pure water and dried under vacuum. 8.95 g of adiazoquinone compound shown by the following formula (PAC-4) wasobtained (yield: 91.0%). It was found that the resulted photosensitizercomprised of 15% of monoester, 43% of diester and 36% of triester byhigh performance liquid chromatography analysis. Analysis by ¹H-NMRindicated the expected structure.

wherein D represents a hydrogen atom or the group shown in Example PAC1of which the percentage by the weight of D is 69%, with the balancebeing a hydrogen atom.

EXAMPLE PAC5: PP415 PAC 88% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with4.06 g (0.0098 mol) of PP415, 6.94 g (0.0258 mol),1,2-naphthoquinone-diazide-4-sulfonylchloride and 172.33 g of acetone.After stirring the mixture to a uniform solution, the reaction solutionwas cooled by the water bath at room temperature. Then, a mixture oftriethylamine/acetone (2.88 g (0.0284 mol)/13.40 g) was slowly addeddropwise while maintaining the temperature at less than 35° C. Afterstirring for three hours at room temperature, 0.39 g (0.0065 mol) ofacetic acid was added to the reaction mixture to neutralize. Afterstirring for 30 minutes further, the reaction mixture was filtered andpoured into a mixture of pure water/acetic acid (891 g/9 g). Afterstirring for 1 hour, the resulting precipitate was collected,sufficiently washed with pure water and dried under vacuum. 5.16 g of aphotosensitizer PAC-4 was obtained (yield: 65.4%). It was found that theresulted photosensitizer comprised of 40% of diester and 35% of triesterby HPLC analysis.

EXAMPLE PAC6: PP415 PAC 67% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged withPP415 (17.0 g; 41 mmol) and acetone (860 mL). The resulting slurry wasplaced under a nitrogen blanket and stirred until the solid haddissolved. 6-diazo-5,6-dihydro-5-oxo-1-naphthalene sulfonyl chloride(22.03 g; 82 mmol) was added to the reaction vessel and the solution wasstirred until the solution was homogeneous. Triethyl amine (TEA, 9.11 g,90 mmol) was charged into the dropping funnel and added to the reactionvessel in a dropwise manner over a 12 minute period. The temperature ofthe reaction vessel was not controlled during the addition of the TEA.

After 3 hours reaction mixture was filtered on a Buchner funnel toremove the precipitated salts and the collected solids were washed withacetone (100 mL). The acetone was added to the filtrate. The combinedorganic phases were stirred with a magnetic stirrer and deionized waterwas added (8.5 mL). After 1 hour, glacial acetic acid (5 ml) was added.After an additional 35 minutes of stirring, the solution was added to avigorously stirring mixture of water (2550 g) and methanol (850 g) overa 1 hour period. The aqueous solution was stirred for a further 10minutes and the solid product recovered by filtered under vacuum andwashed with deionized water (2 L). The product was dried in an oven at40° C. under vacuum for 24 hours. 34 g (94% yield) of yellow powder wasobtained. It was found that the resulting photoactive compound contained10.88% monoester, 40.74% diester and 47.98% trimester.

EXAMPLE PAC7: PP719 PAC 88% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with3.24 g (0.0045 mol) of PP719 and 4.26 g (0.016 mol) of1,2-naphoquinone-diazide-4-sulfonyl chloride and 43.5 g of acetone. Themixture was stirred to effect a uniform solution and cooled to roomtemperature with continued stirring. Next, a mixture oftriethylamine/acetone (1.77 g, 0.017 mol of triethylamine) was addedslowly to the solution while maintaining the temperature at less than35° C. The reaction mixture was stirred for an additional 3 h after theaddition of the triethylamine after which 0.24 g (0.004 mol) of aceticacid was added to quench the reaction. After stirring the mixture for anadditional 30 min., the mixture was filtered and the filtrate added to amixture of acetone/water (2 g/239 g) and this mixture allowed to stir ofan additional 1 h. The resulting precipitate was collected byfiltration, washed with water and then dried under vacuum. 5.60 g ofPAC, an 84% yield, was obtained.

It was found that the PAC was 15% diester, 36% trimester and 42%tetraester by high performance liquid chromatography analysis (HPLC)analysis. Analysis by ¹H-NMR indicated the expected structure.

EXAMPLE PAC8 PP691 PAC 88% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with4.75 g (0.0069 mol) of PP 691 and 6.50 g (0.024 mol) of1,2-naphoquinone-diazide-4-sulfonylchloride and 63.75 g of acetone. Themixture was stirred to produce a uniform solution and cooled to roomtemperature with continued stirring. Next, a mixture oftriethylamine/acetone (2.69 g, 0.027 mol of triethylamine) was addedslowly to the solution while maintaining the temperature at less than35° C. The reaction mixture was stirred for an additional 3 h after theaddition of the triethylamine after which 0.36 g (0.006 mol) of aceticacid was added to quench the reaction. After stirring the mixture for anadditional 30 min., the mixture was filtered and the filtrate added to amixture of acetone/water (4 g/358 g) and this mixture allowed to stir ofan additional 1 h. The resulting precipitate was collected byfiltration, washed with water and then dried under vacuum. 8.11 g ofPAC, an 81.3% yield, was obtained. It was found that the PAC was 13%diester, 30% trimester and 42% tetraester by HPLC analysis. Analysis by¹H-NMR indicated the expected structure.

EXAMPLE PAC9: P334 PAC 100% Targeted Substitution

2-diazo-1-naphthol-5-sulfonyl chloride (8.11 g, 0.035 mol) was chargedto an appropriately sized and equipped reaction vessel. 60 ml acetonewas added and the mixture magnetically stirred. P334 (NBTON-cresol)(10.10 g, 0.03 mol) was dissolved in 50 ml acetone and added to thereaction mixture. All remaining solids dissolved to give a red solutionat 20° C. The mixture was cooled with an dry ice bath to about −5° C.,causing precipitation. Triethylamine (3.33 g, 0.033 mol) was added dropwise. After two minutes, all triethylamine had been added and thereaction temperature rose to −0.9° C. The dry ice bath was removed andthe mixture was allowed to warm to ambient temperature. The mixture wasallowed to stir for an additional 2.75 hr during the warming and thenfiltered to remove any solids. The acetone filtrate was rotaryevaporated to 17.93 g oil.

The oil was dissolved in 100 ml MTBE and treated with 130 ml 10% NH₄OHfor 45 min., separated, and the MTBE phases were washed with brine andwater to pH 8. The combined organic phases was dried over sodiumsulfate, filtered, and rotary evaporated to 9.45 g brown-yellow oil. Theoil product was loaded onto 200 g silica and flushed with 100% MTBE andTONNB-cresol eluted with a small amount of product in the first two 500ml fractions. PAC 567 was collected in the subsequent 12×500 mlfractions to give 14.49 g red oil after rotary evaporation. HPLCanalysis showed two signals that totaled to 96.6% purity. The materialwas then redissolved in 150 ml EtOAc and flushed with EtOAc through 200g silica. All material was collected in the first 3×500 ml fractions,which were rotary evaporated to 17.4 g oil treated with CH₂Cl₂ androtary evaporated down to 0.56 Torr to give 14.44 g red-orange oil (85%yield). NMR analysis showed 0.9 wt % EtOAc and 0.6 wt % CH₂Cl₂remaining. HPLC analysis showed two regioisomers components at 53.7% and45.9% to total 99.6% P334 PAC.

EXAMPLE PAC10: P343 PAC 100% Targeted Substitution

2-Diazo-1-naphthol-5-sulfonyl chloride (NAC-5) (8.48 g, 0.0315 mol) wasplaced in 4-neck 250-ml flask fitted with nitrogen inlet, additionfunnel, and thermowell. 50 ml acetone was added and the mixturemagnetically stirred. DecNB-cresol (9.83 g, 0.0287 mol) was dissolved in60 ml acetone and added to the NAC-5/acetone mixture. All remainingNAC-5 solids dissolved to give a red solution at 21° C. The mixture wascooled to 0° C. Triethylamine (3.50 g, 0.0347 mol) was added drop wisecausing immediate precipitation. After three minutes, all triethylaminehad been added and the reaction temperature had risen to 3° C. The icebath was removed and the mixture was allowed to warm to ambienttemperature. After 15 minutes and at 18.8° C., TLC analysis (50%EtOAc/heptane on silica) showed both starting material and product.After 1.3 hrs at 28° C., the reaction mixture was filtered to remove3.03 g of precipitated triethylammonium chloride ([Et₃NH]Cl). The saltsand reaction flask were rinsed with acetone to bring the final solutionvolume to 200 ml. The filtrate was stirred as 100 ml distilled water wasadded, causing the product to oil out. 2.1 ml acetic acid was added andthen two additional 100 ml portions of water were added, but the oilstill remained. pH of the aqueous phase was 3. The aqueous phase wasdecanted from the oil and extracted with 50 ml and then with 4×25 mldichloromethane. The dichloromethane extracts were added to the oil andthe resulting solution then washed with 2×100 ml brine to pH 3. Theextracts were dried over sodium sulfate, filtered, and rotary evaporatedto 16.77 g oil. The oil was rotary evaporated further at 0.51-0.9 Torrfor 2.5 hrs to give 16.19 g (98% yield) oil. HPLC analysis showed 92.6%DecNBArOQ and 5.7% NAC-5.

The oil was dissolved in 150 ml dichloromethane and washed with 100 ml10% NH₄OH to remove NAC-5. After numerous brine and water washes toachieve pH 8, the dichloromethane solution was dried over sodiumsulfate, filtered, and rotary evaporated to 16.80 g oil. NMR analysisshowed the material contained 6.8 wt % CH₂Cl₂ and a small amount ofNAC-5.

The 16.8 g of oil were dissolved in 150 ml dichloromethane with a smallamount of heptane the solution was stirred with 150 ml 10% NH₄OH for ˜1hr. After work up with water and brine washes, the organic portion wasdried over sodium sulfate, filtered, and rotary evaporated to 15.24 goil. NMR analysis found no NAC-5 and 5-6 wt % CH₂Cl₂. The oil wassonicated with heptane to produce a yellow suspension which was filteredto give 11.06 g of yellow solids. The solids were suspended in pentane,sonicated, and again filtered to give 11.0 g (67% yield) fine yellowsolid, mp 87-88° C. (oils, no bubbling observed). HPLC analysis gave99.4% purity. Data: HPLC analysis done on a Restek Pinnacle C18, 150×4.6mm; Mobile Phase: Methanol in H₂O+0.1% HCO₂H Gradient: 25% to 100% over20 minutes with a 10 minutes hold at 100%; Flow: 1.5 mL/min, Detected @254 nm (VWD). Retention time: 24.113 minutes.

EXAMPLE PAC11: P475 PAC 100% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with2-diazo-1-naphthol-5-sulfonyl chloride (6.5 g, 24.1 mmol) dissolved in24 mL acetone and P343 (C₆H₃-2-Me-OH) (5.7 g, 12.1 mmol) dissolved in 24mL acetone. After 15 minutes stirring a dark orange solution wasobserved. The mixture was cooled to 8° C. and the addition funnel wascharged with triethylamine (3.5 mL, 25.3 mmol). The triethyl amine wasadded drop wise and the reaction mixture was allowed to warm up to roomtemperature. The slurry was stirred for 1 h at room temperature,filtered, and the Et₃NHCl salt and washed with acetone. The filtrate wasconcentrated and the residue was dissolved in 100 mL EtOH+5 mL acetoneand kept in the refrigerator overnight for crystallization.

As no crystals were observed the solution was concentrated and theresidue dissolved with 40 mL acetone and 0.7 g (12.1 mmol) glacialacetic acid and the solution stirred for 1 h at room temperature. Thedark brown solution was poured into 360 mL water and stirred for 30minutes. The light yellow precipitate that resulted was filtered andwashed with water. The crude product was dried under house vacuum togive 12 g of crude product with 93.5% LC purity and 6.5% unreacted NAC-5as impurity. The crude product was treated with aq. NaHCO₃, but nochange in unreacted NAC-5 was observed. Treatment with 10% aq. K₂CO₃treatment gave crude purity of 97.2% with 2.7% unreacted NAC-5. Finallyunreacted NAC-5 was removed by stirring 30 min with 10% NH₄OH andextracting with CH₂Cl₂. The CH₂Cl₂ solution was dried over sodiumsulfate, filtered, and rotary evaporated. The orange fluffy solid wasfurther dried under high vacuum to give 10.5 g (92.9% yield) product asorange very fluffy solid with HPLC purity 98.5%. NMR and MS wereconsistent with the desired structure. Data: HPLC: Column: RestekPinnacle C18, 150×4.6 mm; Mobile Phase: MeOH in H₂O+0.1% FA. Gradient:5% to 100% MeOH in H₂O (0.1% FA) over 20 minutes with a 10 minutes holdat 100% MeOH; Flow: 1.5 mL/min, Runtime: 30 min, Detected @ 254 nm(VWD); Retention time: 21.82 minutes

EXAMPLE PAC12: P308 PAC 100% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with2-diazo-1-naphthol-5-sulfonyl chloride (7.3 g, 27.2 mmol) dissolved in25 mL acetone and PP308 (C₆H₃-3-Me-OH)₂ (4.2 g, 13.6 mmol) dissolved in25 mL acetone. After 15 minutes stirring a dark orange solution wasobserved. The mixture was cooled to 10° C. and the addition funnel wascharged with triethyl amine (4.0 mL, 28.6 mmol). The triethyl amine wasadded drop wise and the reaction mixture warmed to room temperature. Theslurry was stirred for 1 h at room temperature, the Et₃NHCl saltfiltered and washed with acetone. The filtrate was stirred with 1.6 g(27.2 mmol) glacial acetic acid for 30 minutes at room temperature. Thedark brown solution was poured into 800 mL water and a yellowprecipitate was observed and stirred for 1 h. The light yellowprecipitate was filtered and washed with water. The crude product wasdried under house vacuum to give 27.8 g of wet crude product that wascombined with a previous crude product and dissolved in 200 mL CH₂Cl₂and washed with aq. NaHCO₃ and brine. The CH₂Cl₂ solution was dried oversodium sulfate, filtered, and rotary evaporated. The orange fluffy solidwas further dried under high vacuum overnight to give 12.4 g (95.4%yield) product as an orange fluffy solid with HPLC purity 98.1%. NMR andMS were consistent with the desired structure.

EXAMPLE PAC13: P459 PAC 100% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with2-diazo-1-naphthol-5-sulfonyl chloride (5.4 g, 20.0 mmol) dissolved in20 mL acetone and PP459 (4.6 g, 10.0 mmol) dissolved in 20 mL acetone.After 15 minutes stirring a dark orange solution was observed. Themixture was cooled to 10° C. and the addition funnel was charged withtriethyl amine (2.9 mL, 21.0 mmol). The triethyl amine was added dropwise and the reaction mixture warmed to room temperature. The slurry wasstirred for 1 h at room temperature, the Et₃NHCl salt filtered andwashed with acetone. The filtrate was stirred with 1.2 g (20.0 mmol)glacial acetic acid for 30 minutes at room temperature. The dark brownsolution was poured into 700 mL water and a yellow turbid solution wasobserved and stirred for 1 h. The light yellow turbid solution wasextracted with (3×200 mL) CH₂Cl₂ and washed with aq. NaHCO₃ and brine.The CH₂Cl₂ solution was dried over sodium sulfate, filtered, and rotaryevaporated. The orange fluffy solid was further dried under high vacuumovernight to give 7.9 g (85.0% yield) product as an orange fluffy solidwith HPLC purity 97.6%. NMR and MS were consistent with the desiredstructure.

EXAMPLE PAC14: P343 PAC 100% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with2-diazo-1-naphthol-5-sulfonyl chloride (5.04 g, 18.8 mmol) dissolved in20 mL acetone and PP399 (C₆H₂-2,5-Me₂-OH)₂ (4.0 g, 9.4 mmol) dissolvedin 20 mL acetone. After 15 minutes stirring a dark orange solution wasobserved. The mixture was cooled to 10° C. and the addition funnel wascharged with triethyl amine (2.74 mL, 18.8 mmol). The triethyl amine wasadded drop wise and the reaction mixture warmed to room temperature. Theslurry was stirred for 1 h at room temperature, the Et₃NHCl saltfiltered and washed with acetone. The filtrate was stirred with 1.1 g(18.8 mmol) glacial acetic acid for 30 minutes at room temperature. Thedark brown solution was poured into 600 mL water and a yellowprecipitate was observed and stirred for 1 h. The light yellowprecipitate was filtered and washed with water. The crude product wasdried under house vacuum to give 28.8 g of wet crude product that wascombined with a previous crude product and dissolved in 250 mL CH₂Cl₂and washed with aq. NaHCO₃ and brine. The CH₂Cl₂ solution was dried oversodium sulfate, filtered, and rotary evaporated. The orange fluffy solidwas further dried under high vacuum overnight to give 10.2 g (98.2%yield) product as an orange fluffy solid with HPLC purity 99.35%. NMRandMS were consistent with the desired structure.

EXAMPLE PAC14: PP375 PAC 100% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with2-diazo-1-naphthol-5-sulfonyl chloride (0.86 g, 3.2 mmol) dissolved in3.5 mL acetone and PP375 (0.6 g, 1.6 mmol) dissolved in 3.5 mL acetone.After 15 minutes stirring a dark orange solution was observed. Themixture was cooled to 10° C. and the addition funnel was charged withtriethylamine (0.5 mL, 3.4 mmol). The triethylamine was added drop wiseand the reaction mixture warmed to room temperature. The slurry wasstirred for 1 h at room, temperature, the Et₃NHCl salt filtered andwashed with acetone. The filtrate was stirred with 0.2 g (3.2 mmol)glacial acetic acid for 30 minutes at room temperature. The dark brownsolution was poured into 100 mL water and a yellow precipitate wasobserved and stirred for 1 h. The light yellow precipitate was filteredand washed with water. The crude product was dried under house vacuum togive 28.8 g of wet crude product that was combined with a previous crudeproduct and dissolved in 100 mL CH₂Cl₂ and washed with aq. NaHCO₃ andbrine. The CH₂Cl₂ solution was dried over sodium sulfate, filtered, androtary evaporated. The orange fluffy solid was further dried under highvacuum overnight to give 1.2 g (89.5% yield) product as an orange fluffysolid with LC purity 98.4%. NMR and MS were consistent with the desiredstructure.

EXAMPLE PAC15: PP351 PAC 100% Targeted Substitution

An appropriately sized and equipped reaction vessel was charged with2-diazo-1-naphthol-5-sulfonyl chloride (7.7 g, 28.5 mmol) dissolved in30 mL acetone and PP351 (C₆H₂-2,5-Me₂-OH)₂ (5 g, 14.2 mmol) dissolved in30 mL acetone was added. After 15 minutes stirring a dark orangesolution was observed. The mixture was cooled to 10° C. and the additionfunnel was charged with triethylamine (4.18 mL, 29.9 mmol). Thetriethylamine was added drop wise and the reaction mixture warmed toroom temperature. The slurry was stirred for 1 h at room temperature,filtered and the Et₃NHCl salt washed with acetone. The filtrate wasstirred with 1.7 g (28.5 mmol) glacial acetic acid for 30 minutes atroom temperature. The dark brown solution was poured into 900 mL waterand yellow precipitate was observed, and stirred for 1 h. The lightyellow precipitate was filtered and washed with water. The crude productwas dried under house vacuum to give 12 g of crude wet product that wasdissolved in 200 mL CH₂Cl₂ and washed with aq. NaHCO₃ and brine. TheCH₂Cl₂ solution was dried over sodium sulfate, filtered, and rotaryevaporated. The orange fluffy solid was further dried under high vacuumovernight to give 11.5 g (99.1% yield) product as a very fluffy, orangesolid with HPLC purity 99.9%. NMR and MS were consistent with thedesired structure.

Positive-tone Resin Compositions

The positive-tone photosensitive resin composition embodiments inaccordance with the present invention encompass one of a PBOalkali-soluble resin (A) or a PNB alkali-soluble resin (A*); aphotoactive compound (B) that encompasses an NBane-type ballastcompound, such as described herein, where some or all of the arylhydroxide groups have each been replaced by one of the followingsulfonic acids or their respective acid chlorides:1,2-naphthoquinone-2-diazido-5-sulfonic acid,1,2-naphthoquinone-2-diazido-4-sulfonic acid or2-diazo-4-hydrosulfonylcyclohex-3-enone, the structures of which areshown, respectively below, to form the esters thereof:

and an appropriate casting solvent.

Advantageously, it has been found that the dimensional change ofpatterns formed from films made from such photosensitive resincomposition embodiments provide for both high photosensitivity and highpattern resolution even where the thickness of film formed thereof isgreater than or equal to 10 μm.

The content of the photosensitizer (B) is, but not particularly limitedto, preferably 1 to 50 parts by weight, especially preferably 10 to 40parts by weight, relative to 100 parts by weight of the alkali-solubleresin (A). By setting the content of such a photosensitizer within therange mentioned above, it is possible to obtain a positive-typephotosensitive resin composition with a good sensitivity and resolutionwithout the scum, as well as with a small dimensional change of patternsbefore and after curing.

Resin A

The alkali-soluble resin (A) used in some of the positive-tone, aqueousbase developable, photosensitive resin composition embodiments inaccordance with the present invention that are described hereinencompasses a resin having a benzoxazole precursor structure in the mainchain. From the viewpoint of ensuring excellent sensitivity andresolution when forming a coated layer pattern, and ensuring excellentheat resistance and mechanical strength of the cured layer, a resinhaving a benzoxazole precursor structure and an imide structure in themain chain and further having a hydroxyl group, a carboxyl group, anether group, or an ester group in the main chain or a side chain; aresin having a benzoxazole precursor structure and an imide precursorstructure in the main chain; and a resin having a benzoxazole precursorstructure and an amide ester structure in the main chain are useful asthe alkali-soluble resin (A). Such a resin (A) is shown in generic formby the following formula DD, where such resin encompasses a firstrepeating unit indicated as D1 and a second repeating unit indicated asD2:

Such first and second repeating units are generally dispersed randomlythroughout resin (A) being bonded via an amide bond, as shown.

In formula DD, X and Y are organic groups. R₄ is a group selected froman alkylene group, a substituted alkylene group, —O—, —S—, —SO₂—, —CO—,—NHCO—, and —C(CF₃)₂—R₅ is an alkyl group, an alkoxy group, an acyloxygroup or a cycloalkyl group, and if there are two or more R₅ s, each R₅can be either the same or different. R₆ represents an —O—R₈— group andif there are two or more R₆ s, each R₆ can be either the same ordifferent. R₇ is a hydroxyl group, a carboxyl group, —O—R₈—, or —COO—R₈—and if there are two or more R₇ s, the R₇ s can be either the same ordifferent. R₈ represents an organic group. having 1 to 15 carbon atoms.Each r is independently an integer of 0 to 3, each t independently aninteger of 0 to 2, each s independently an integer of 0 to 4, and each uindependently an integer of 0 to 4. The variables a and b shown for thefirst and second repeating units, respectively, indicate the molarratio, by percentage, of such repeating units in alkali-soluble resin(A), the sum of a and b being 100%. Generally, a is 30 to 100%, and b is0 to 70%. In formula DD, a and b indicate the mole percent,respectively, of the structural unit shown by formula D1 and thestructural unit shown by formula D2 in the alkali-soluble resin (A), butdo not indicate that these structural units are continuous. Thealkali-soluble resin (A) shown by formula DD includes structures derivedby ring-closing of part of the benzoxazole precursor structure, amideacid ester structure, or imide precursor structure shown in formula DD.

Exemplary alkylene and substituted alkylene groups, shown as R₄ in therepeating unit of formula D1, include, but are not limited to, —CH₂—,—CH(CH₃)—, —C(CH₃)₂—, —CH(CH₂CH₃)—, —C(CH₃)(CH₂CH₃)—,—C(CH₂CH₃)(CH₂CH₃)—, —CH(CH₂CH₂CH₃)—, —C(CH₃)(CH₂CH₂CH₃)—,—CH(CH(CH₃)₂)—, —C(CH₃)(CH(CH₃)₂)—, —CH(CH₂CH₂CH₂CH₃)—,—C(CH₃)(CH₂CH₂CH₂CH₃)—, —CH(CH₂CH(CH₃)₂)—, —C(CH₃)(CH₂CH(CH₃)₂)—,—CH(CH₂CH₂CH₂CH₂CH₃)—, —C(CH₃)(CH₂CH₂CH₂CH₂CH₃)—,—CH(CH₂CH₂CH₂CH₂CH₂CH₃)—, —C(CH₃)(CH₂CH₂CH₂CH₂CH₂CH₃)—. It will beunderstood that such groups can produce an alkali-soluble resin (A)exhibiting sufficient solubility in both an alkaline aqueous solution,and in an appropriate solvent.

In resin (A), —O—R₈ as the substituent of X, and —O—R₈ and —COO—R₈ asthe substituent of Y are groups in which a hydroxyl group or a carboxylgroup is protected by R8, an organic protecting group having 1 to 15carbon-atoms where the number of carbons selected for R₈ is generallyuseful for adjusting the solubility of the hydroxyl group or carboxylgroup in an alkaline aqueous solution. Exemplary protecting groups caninclude, among others, a formyl group, a methyl group, an ethyl group, apropyl group, an isopropyl, a tert-butyl group, a tert-butoxycarbonylgroup, a phenyl group, a benzyl group, a tetrahydrofuranyl group, atetrahydropyranyl group.

Resin (A) can be obtained by, for example, reacting a bis(aminophenol)which is a polymerization raw material from which the structureoriginating from diamine in the structural unit shown by formula D1 isderived, optionally a diamine which is a polymerization raw materialfrom which the structure originating from the diamine including X in thestructural unit shown by formula D2 is derived, and a compound selectedfrom the group consisting of tetracarboxylic dianhydride, trimelliticanhydride, dicarboxylic acid, dicarboxylic acid dichloride, dicarboxylicacid derivatives, hydroxy dicarboxylic acid, hydroxy dicarboxylic acidderivatives, and the like, which are polymerization raw materials fromwhich a structure originating from an acid including Y in the structuralunit shown by formula D1 and the structural unit shown by formula D2 arederived. In the case of the dicarboxylic acid, an active ester-typedicarboxylic acid derivative previously reacted with1-hydroxy-1,2,3-benzotriazole or the like can be used in order toincrease the reaction yield.

Alternative structures and details of such PBO resins are known and canbe found, for example, in previously mentioned U.S. Pat. No. 7,781,131which is incorporated herein by reference.

Resin A*

The alkali-soluble resin (A*) used in some other of the positive-tone,aqueous base developable, photosensitive resin composition embodimentsin accordance with the present invention that are described hereinencompasses a resin having a polynorbornene-type structure in the mainchain and is referred to herein as a PNB or PNB resin (A*). From theviewpoint of ensuring excellent sensitivity and resolution when forminga coated layer pattern, and ensuring excellent heat resistance andmechanical strength of the final layer, a resin having apolynorbornene-type structure in the polymer backbone, where suchstructure is formed by a vinyl addition process rather than a ROMPprocess, is useful as the alkali-soluble resin (A*). Such a resin (A*)is shown in generic form by the following formula EE, where such resinencompasses a first repeating unit indicated as E1 and a secondrepeating unit indicated as E2:

Such first and second repeating units are generally dispersed randomlythroughout resin (A*) being bonded via an amide bond, as shown. Thevariables ‘a’ and ‘b’ shown for the first and second repeating units,respectively, indicate the molar ratio, by percentage, of such repeatingunits in alkali-soluble resin (A*), the sum of a and b being 100%. Itshould be understood, however, that not all such resins (A*) have afirst and a second repeating unit. Rather some resins (A*) arehomopolymers and therefore have only one type of repeating unit, whileother resins (A*) have more than two types of repeating units. Thuswhere, for example, there are three types of repeating units a variable‘c’ would be used the denote the mole percent of that third type ofrepeat unit and then the sum of a, b and c would be 100%.

As mentioned above PNB resins in accordance with formula EE are formedvia a vinyl addition polymerization reaction. Such reaction results inthe 2,3-enchainment of norbornene-type monomers via a metal catalyzedaddition reaction. Suitable metal catalysts are generally Pd or Nicontaining and they and the polymerization reactions they cause to occurare described in U.S. Pat. No. 6,455,650 and U.S. Pat. No. 6,232,417,respectively, the pertinent parts of which are incorporated herein byreference.

Referring again to formula EE, any of R^(a), R^(b), R^(c), R^(d), R^(e),R^(f), R^(g) and R^(h) can be a hydrocarbyl group, where such group canbe a C₁ to C₃₀ alkyl, aryl, aralkyl, alkaryl, alkenyl, alkynyl,cycloalkyl, cycloalkenyl, alkylidenyl or alkylsilyl group.Representative alkyl groups include, but are not limited to, methyl,ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, tert-butyl,pentyl, neopentyl, hexyl, heptyl, octyl, nonyl and decyl. Representativealkenyl groups include, but are not limited to, vinyl, allyl, butenyland cyclohexenyl. Representative alkynyl groups include, but are notlimited to, ethynyl, 1-propynyl, 2-propynyl, 1-butynyl and 2-butynyl.Representative cycloalkyl groups include, but are not limited to,cyclopentyl, cyclohexyl and cyclooctyl substituents. Representative arylgroups include, but are not limited to, phenyl, naphthyl andanthracenyl. Representative aralkyl groups include, but are not limitedto, benzyl and phenethyl. Representative alkylidenyl groups includemethylidenyl and ethylidenyl groups. In addition, it should be notedthat the hydrocarbyl groups mentioned above can be substituted, that isto say one of the hydrogen atoms replaced, with C₁-C₁₀ alkyl, haloalkyland perhaloalkyl groups, aryl groups and cycloalkyl groups.

Any of R^(a) to R^(h) can also be a halohydrocarbyl group, where suchgroup includes any of the hydrocarbyls mentioned above where at leastone, but less than all, of the hydrogen atoms of the hydrocarbyl arereplaced by a halogen (fluorine, chlorine, bromine or iodine).Additionally, any of R^(a) to R^(h) can be a perhalocarbyl, where suchgroup includes any of the hydrocarbyls mentioned above where all of thehydrogen atoms of the hydrocarbyl are replaced by a halogen. Usefulperfluorinated substituents include perfluorophenyl, perfluoromethyl,perfluoroethyl, perfluoropropyl, perfluorobutyl and perfluorohexyl.

Further, it will be understood that any of R^(a) to R^(h) can also be aheterohydrocarbyl group, which refers to any of the previously describedhydrocarbyls, halohydrocarbyls and perhalohydrocarbyls where at leastone carbon of the carbon chain is replaced with N, O, S, Si or P.Non-limiting examples include heterocyclic aromatic groups such aspyrrolyl, furanyl, and the like, as well as non-aromatic groups such asethers, thioethers and silyl ethers, alcohols, carboxylic acids andesters, ketones and aldehydes. Specific, useful monomers for thepreparation of PNB resin (A*) are listed in the table below, where foreach acronym a representative chemical name is provided:

HFANB 2-(bicyclo[2.2.1]hept-5-en-2-ylmethyl)-1,1,1,3,3,3-hexafluoropropan-2-ol TFSNB N-(bicyclo[2.2.1]hept-5-en-2-ylmethyl)-1,1,1- trifluoromethanesulfonamide FPCNB2,2,3,3,3-pentafluoropropylester of 5-norbornene- 2-carboxylic acidNBMeOAc 2-hydroxymethyl-5-norbornene acetate NBPhOAc4-(bicyclo[2.2.1]hept-5-en-2-yl)phenyl acetate t-BuEsNB t-butylester of5-norbornene-2-carboxylic acid MCPNB5-(1-methylcyclopentyl)bicyclo[2.2.1]hept-2-ene NB norbornene TFENBbicyclo[2.2.1]hept-5-ene-2-carboxylic acid tetrahydro- 2-oxo-3-furanylester TESNB (bicyclo[2.2.1]hept-5-en-2-ylmethyl)triethoxysilane MGENB2-((bicyclo[2.2.1]hept-5-en-2- ylmethoxy)methyl)oxirane Acid NBbicyclo[2.2.1]hept-5-ene-2-carboxylic acid DecNB5-decylbicyclo[2.2.1]hept-2-ene PENB 5-phenethylbicyclo[2.2.1]hept-2-eneBuNB 5-butylbicyclo[2.2.1]hept-2-ene NBM(PhMeOH)₂4,4′-(bicyclo[2.2.1]hept-5-en- 2-ylmethylene)bis(2-methylphenol) NBMMPA4-norbornenylmethyl-2-methoxyphenol acetate NBMMPhOH4-(bicyclo[2.2.1]hept-4-en-2-ylmethyl)-2- methoxyphenol NBMMHFP2-((bicyclo[2.2.1]hept-5-en-2-yloxy)methyl)-1,1,1,3,3,3-hexafluoropropan-2-ol EPENB ethyl3-(bicyclo[2.2.1]hept-2-en-2-yl)propanoate EPANB3-(bicyclo[2.2.1]hept-2-en-2-yl)propanoic acid NBPhOH4-(bicyclo[2.2.1]hept-5-en-2-yl)phenol NBE4ECBz2-(bicyclo[2.2.1]hept-5-en-2-yl)ethyl 4- ((ethoxycarbonyl)oxy)benzoateNBE2AcOBz 2-(bicyclo[2.2.1]hept-5-en-2-yl)ethyl 2- acetoxybenzoateNBE2OHBz 2-(bicyclo[2.2.1]hept-5-en-2-yl)ethyl 2- hydroxybenzoateNBMGlyHFP 2-(2-(bicyclo[2.2.1]hept-5-en-2-yloxy)ethoxy)-1,1,1,3,3,3-hexafluoropropan-2-ol

The positive-tone photosensitive resin composition embodiments inaccordance with the present invention are first used to make a film whenapplied in an appropriate manner to an appropriate support (substrate).Such substrates include, but are not limited to, a silicon wafer, aceramic substrate or an aluminum. When applied such a substrate, anappropriate amount of such composition embodiment is used to make a filmwith a desired final thickness, (e.g. from 0.1 to 30 μm). Examples ofthe method for applying the composition to a substrate include spincoating, spray coating, immersion coating, printing and roll coating.

After a positive-tone photosensitive resin composition embodiment isapplied to a substrate to form a coating film, such film is dried toremove any residual casting solvent and form a dried film. While thetime and temperature of such a prebake step is generally a function of,among other things, the thickness of the applied film, the castingsolvent used and the method of coating, usually a temperature from 60 to150° C. for from 20 to 120 seconds is appropriate. It should of coursebe understood that the specific temperatures and times provided aboveare exemplary and other times and/or temperatures can also be employed.

Once a dried film is obtained, such film is typically exposed to anappropriate amount of actinic radiation. Such exposure generally beingdone through a masking element such that some portions of the film areexposed to the radiation while other portions remain unexposed. Whileactinic radiation generally refers to radiation in the UV range ofwavelengths, herein such term will be understood to also refer to Xrays, electron beams, and wavelengths of such radiation in the visiblerange of wavelengths. The intensity of the radiation employed and itsduration combine to define the term “exposure dose” and an appropriatedose, will be a function of, among others, the resin and PAC employed tomake the film as well as the film thickness and the PAC concentration inthe film.

While image development generally follow the exposure step, for someembodiments in accordance with the present invention, a post exposurebake (PEB) may be performed, where the conditions of PEB are oftensimilar to the pre-exposure bake previously discussed. When imagedevelopment is performed, an aqueous alkali developer. Exemplarydevelopers include, but are not limited to aqueous solutions of alkalicompounds such as inorganic alkali compounds, for example, sodiumhydroxide, potassium hydroxide, sodium carbonate, sodium silicate,sodium metasilicate and ammonia water as well as some aqueous solubleorganic amines and amine salts. As the development method, there may beused spraying, puddling, immersion, and application of supersonic waves.It will be understood that as the film forming composition embodimentsin accordance with the present invention employ a DNQ substituted PAC,such material serves to depress the dissolution rate of the resin inthose film regions that were unexposed as compared to the exposedregions. In this manner a positive image of the masking elements isformed.

Next, the relief pattern formed by development process is rinsed toremove any residual developer material and where a PBO resin (A) wasemployed, the resulting patterned film heated to “cure” the resin. Thatis to say, to form an oxazole ring, an imide ring, or both of the imidering and oxazole ring, whereby a final pattern having excellent heatresistance can be obtained. Where a PNB resin (A*) was employed,generally a curing step is not needed as the PNB resin is generallycompletely polymerized at the time it is used to form the film formingcomposition. However, for some PNB resin (A*) embodiments, one or moreof the repeating units of such resin can have pendent groups thatprovide for a cross-linking reaction to occur within such remainingregions.

Where the heating step is needed to cure a PBO resin (A), such heatingis generally at temperatures at or below 350° C. and often below 300° C.Where the heating step is needed to induce the crosslinking of a PNBresin (A*), such heating is generally at temperatures at or below 300°C. and often below 250° C. Regarding a method for such heating to cureor crosslink the resin, an oven, hot plate, electric furnace, infraredrays or microwave are generally appropriate means for such heating.

The finally made films made from the resin composition embodiments ofthe present invention are useful as protective films or insulated filmsfor microelectronic devices such as a semiconductor element or the like,and also for optoelectronic devices such as a TFT liquid crystal andorganic EL displays, an interlayer insulating film of a multilayeredcircuit, a cover coat of a flexible copper-clad board, a solder resistfilm and a liquid crystal alignment film.

Moreover, the microelectronic and optoelectronic device embodiments ofthe present invention are characterized by encompassing theaforementioned films, where such films can be patterend as describedabove, or simply blanket exposed to the actinic radiation so that acontinuous final film results.

Examples of the application to semiconductor devices include apassivation film obtained by forming a cured film of the aforementionedpositive photosensitive resin composition on a semiconductor element; aprotecting film such as a buffer coating film obtained by forming acured film of the aforementioned positive photosensitive resincomposition on the passivation film; an insulating film such as aninterlayer insulating film obtained by forming a cured film of theaforementioned positive photosensitive resin composition on the circuitformed on the semiconductor element; an α-ray shielding film; aflattening film; a projection (a resin post); a partition; and the like.

Examples of the application of embodiments of the present invention todisplay devices include a protecting film obtained by forming a cured orfinal film of the aforementioned photosensitive resin composition on adisplay element; an insulating film or a flattening film for a TFTelement or a color filter; a projection for an MVA-type liquid crystaldisplay device and the like; a partition for an organic EL elementcathodes; and the like. The method of use of the composition forsemiconductor devices applies to the method of use for the displaydevices, that is, a method of forming a patterned layer of thephotosensitive resin composition on a substrate on which a displayelement or a color filter is formed may be used. High transparency isrequired particularly for an insulating film or a flattening film ofdisplay devices. A resin layer excellent in transparency can also beobtained by introducing a post exposure process before curing the layerof the photosensitive resin composition. Introduction of such a postexposure process is further preferable in practice.

Resin (A) and Photo Evaluation Thereof EXAMPLE RESIN A1 Row 1 and 2

To an appropriately sized and equipped reaction vessel, 416.13 g (0.845mol) of a dicarboxylic acid derivative (active ester), which wasobtained by reacting 0.845 mol of diphenyl ether-4,4′-dicarboxylic acidand 1.690 mol of 1-hydroxy-1,2,3-benzotriazole, and 329.63 g (0.900 mol)of hexafluoro-2,2-bis(3-amino-4-hydroxyphenyl)propane and 23.03 g (0.100mol) of bis(3-amino-4-hydroxyphenyl)methane was charged under a nitrogenblanket. Then 3050 g of N-methyl-2-pyrrolidone was added to dissolve thedicarboxylic derivative and the reaction mixture heated to 75° C. for 16hours. Next, 50.89 g (0.310 mol) of 5-norbornene-2,3-dicarboxylicanhydride and 200 g of N-methyl-2-pyrrolidone were added and the mixturewas stirred at temperature for an additional 3 hours to complete thereaction.

The reaction mixture was filtered and poured into a 3:1 (volume ratio)mixture of water and isopropanol. The resulting precipitate wascollected by filtration was sufficiently washed with water and driedunder vacuum to obtain a polybenzoxazole precursor resin (A-1) with anumber average molecular weight (M_(n)) of 9,200.

EXAMPLE RESIN A2 Row 3

To an appropriately sized and equipped reaction vessel, 378.06 g (0.830mol) of a dicarboxylic acid derivatives (active ester), which wereobtained by reacting 0.498 mol of diphenyl ether-4,4′-dicarboxylic acidand 0.998 mol of 1-hydroxy-1,2,3-benzotriazole and 0.332 mol ofisophthalic acid and 0.664 mol of 1-hydroxy-1,2,3-benzotriazole, and146.50 g (0.400 mol) ofhexafluoro-2,2-bis(3-amino-4-hydroxyphenyl)propane, 85.91 g (0.300 mol)of 4,4′-methylenebis(2-amino-3,6-dimethyl phenol) and 69.08 g (0.300mol) of bis(3-amino-4-hydroxyphenyl)methane under a nitrogen blanket.2050 g of N-methyl-2-pyrrolidone was added to dissolve the mixture andthe mixture heated to 75° C. for 16 hours. Next, 55.81 g (0.340 mol) of5-norbornene-2,3-dicarboxylic anhydride and 170 g ofN-methyl-2-pyrrolidone were added and the mixture was stirred for anadditional 3 hours to complete the reaction.

The reaction mixture was filtered and poured into a 3:1 (volume ratio)mixture of water and isopropanol. The resulting precipitate wascollected by filtration was sufficiently washed with water and driedunder vacuum to obtain a polybenzoxazole precursor resin (A-2) with anumber average molecular weight (M_(n)) of 9,300.

EXAMPLE RESIN A-3 Row 4

An appropriately sized and equipped reaction was charged under nitrogenwith 3,3′-diaminodiphenylmethane 29.74 g (0.15 mol) andN-methyl-2-pyrrolidone 300 g, to form a solution thereof. After additionof 4,4′-oxydiphthalic anhydride 39.09 g (0.126 mol), the reaction wasstirred at room temperature for one hour and then in an oil bath at 65°C. for 2 hours. Then, a dicarboxylic acid derivative (active ester)351.62 g (0.714 mol) obtained by reactinghexafluoro-2,2-bis(3-amino-4-hydroxyphenyl)propane 311.32 g (0.85 mol)and diphenyl ether-4,4′-dicarboxylic acid (0.714 mol) with1-hydroxy-1,2,3-benzotriazole (1.428 mol) was added together withN-methyl-2-pyrrolidone 2600 g, was added and the resulting mixtureheated to 75° C. and stirred for 16 hours. Subsequently, after additionof 52.53 g (0.320 mol) of 5-norbornene-2,3-dicarboxylic anhydridedissolved in 150 g of N-methyl-2-pyrrolidone, the mixture was stirredfor further 3 hours to complete the reaction. The reaction mixture wasfiltered, and poured into a 3:1 (volume ratio) mixture of water andisopropanol. The resulting precipitate was collected by filtration,washed well with water, and dried under vacuum to obtain a copolymerresin composed of the polyimide precursor and the polybenzoxazoleprecursor as an alkali-soluble resin (A-3) with a number averagemolecular weight of 8100.

Composition Example PBO A-1 PAC-1

10 g of the synthesized polybenzoxazole precursor resin (A-1) and 1.4 gof diazoquinone compound which has a structure of the formula (PAC-1)were dissolved in a solvent of 13 g of γ-butyrolactone. The solution wasfiltered through a Teflon® (filter with a pore size of 0.2 μm to obtaina photosensitive resin composition.

Photoimaging 1 of Composition Example PBO A-1 PAC-1

The photosensitive resin composition was applied to a silicon waferusing a spin coater and prebaked on a hot plate at 120° C. for 200seconds to obtain a coated film with a thickness of about 13.0 μm. Thecoated film on the wafer was irradiated using i-line stepper (NSR-4425i,Nikon Co.) through a mask (a test chart No. 1 having a remnant patternand an extract pattern, each having a width of 0.88 to 50 μms,manufactured by Toppan Printing Co., ltd.) while changing the exposuredose. Then, the coated wafer was developed twice by a paddle methodusing an aqueous solution of 2.38% tetramethylammonium hydroxide for 25seconds each time to remove the exposed areas and washed with purifiedwater for 10 seconds.

As a result, it was confirmed that the pattern was formed starting atthe area irradiated at a dose of 410 mJ/cm², indicating very highsensitivity (sensitivity was 410 mJ/cm²). The resolution was 4 μm andthe scum was not confirmed. The film thickness after development was11.0 μms.

As a result of measuring the dimension of a 10 μm square pattern openingin the area exposed at a dose of 460 mJ/cm² on a wafer with patternsprepared above by a laser microscope OPTELICS (registered trade mark)H1200 (manufactured by Lasertec Corp.), there was obtained a result of10.1 um. Then, heat treatment of the wafer with patterns was performedfor 180 seconds using a hot plate set to 320° C. After such a heattreatment, the dimension of the same opening was measured to provide agood result of 9.8 um.

Photoimaging 2 Composition Example PBO A-1 Q-2

A photosensitive resin composition was prepared in the same manner as inExample 1, except for using the photosensitizer (Q-2) instead of thephotosensitizer (Q-1), and evaluated in the same manner as in Example 1.The results were shown in Table 1. In addition, evaluation of thedimensional changes before and after curing was performed using a 10 μmsquare pattern opening in the area exposed at a dose of 490 mJ/cm².

Photoimaging 3 Composition Example PBO A-2 Q-3

A photosensitive resin composition was prepared in the same manner as inExample 1, except for using the alkali-soluble resin (A-2) instead ofthe alkali-soluble resin (A-1) and 1.5 g of the photosensitizer (Q-3)instead of 1.4 g of the photosensitizer (Q-1), and evaluated in the samemanner as in Example 1. The results were shown in Table 1. In addition,evaluation of the dimensional changes before and after curing wasperformed using a 10 μm square pattern opening in the area exposed at adose of 480 mJ/cm².

Photoimaging 4 Composition Example PBO A-3 Q-1

A photosensitive resin composition was prepared in the same manner as inExample 1, except for using the alkali-soluble resin (A-3) instead ofthe alkali-soluble resin (A-1) and changing the blending amount of thephotosensitizer (Q-1) to 1.7 g, and evaluated in the same manner as inExample 1. The results were shown in Table 1. In addition, evaluation ofthe dimensional changes before and after curing was performed using a 10μm square pattern opening in the area exposed at a dose of 570 mJ/cm².

Composition Comparative Example 1

A photosensitive resin composition was prepared in the same manner as inExample 1, except for using the photosensitizer (Q-4) instead of thephotosensitizer (Q-1), and evaluated in the same manner as in Example 1.The results were shown in Table 1. In addition, evaluation of thedimensional changes before and after curing was performed using a 10 μmsquare pattern opening in the area exposed at a dose of 600 mJ/cm².

Composition Comparative Example 2

A photosensitive resin composition was prepared in the same manner as inExample 3, except for using the photosensitizer (Q-4) instead of thephotosensitizer (Q-3), and evaluated in the same manner as in Example 1.The results were shown in Table I. In addition, evaluation of thedimensional changes before and after curing was performed using a 10 μmsquare pattern opening in the area exposed at a dose of 620 mJ/cm².

Composition Comparative Example 3

A photosensitive resin composition was prepared in the same manner as inExample 4, except for using the photosensitizer (Q-4) instead of thephotosensitizer (Q-1), and evaluated in the same manner as in Example 1.The results were shown in Table 1. In addition, evaluation of thedimensional changes before and after curing was performed using a 10 μmsquare pattern opening in the area exposed at a dose of 690 mJ/cm², butit was confirmed by observation of the patterns after curing that suchopenings were filled and not opened.

TABLE 1 †PAC Ex. # Lithography Data ††Dimensions Formulation LoadingResin Sensitivity Resolution Feature Size Ex # (pphr) Ex # (mJ/cm²) (μm)Change (μm) Comp Ex 1 PAC-4 A-1 550 5 9.1 14 Comp Ex 2 PAC-4 A-2 570 59.0 15 Comp Ex 3 PAC-4 A-3 640 10 filled in 17 1 PAC-1 A-1 410 4 0.3 142 PAC-2 A-1 440 4 0.2 14 3 PAC-3 A-2 430 4 0.3 15 4 PAC-1 A-3 520 6 0.317 †all PACs are 88% Target DNQ Loading ††Change measured before andafter the resin (A) cure cycle

As seen in the data from Table 1, The Ex 1-4 resin compositions thatencompassed NBane-type PACs in accordance with embodiments of thepresent invention, showed increased photo sensitivity, resolution andincreased feature size stability in comparison to the each ComparativeExample that employed the same resin but with a previously knowncommercial PAC.

Polynorbornene System

The photoactive formulation examples presented below demonstrate theeffectiveness of NBane-type PAC embodiments in accordance with thepresent invention formulated with an exemplary PNB resin (A*). Examplesare identified by the specific NBane-type PAC employed and each exampleincludes both formulation methods and imaging data.

Photoactive Formulation P475 PAC Example PAC11

8.40 g of an addition polymerized polynorbornene polymer composed ofendo,exo-2-(bicyclo[2.2.1]hept-5-en-2-ylmethyl)-1,1,1,3,3,3-hexafluoropropan-2-ol(HFANB) (75 mol %) andendo,exo-3-(bicyclo[2.2.1]hept-5-en-2-yl)propanoic acid (EPENB) (25 mol%) was dissolved in PGMEA (14.1 g) to yield a polymer solution at 37.8wt % solids. This polymer solution was filtered through a 0.5 μm Teflon®filter to remove gels and dust contamination and placed in an amber, lowparticle 125 mL bottle. Next, PP475 PAC (2.10 g) and PGMEA (5.42 g) wascharged into the filtered polymer solution. The suspension of solidPP475 PAC in PGMEA polymer solution was mixed on a roller for 18 hoursat ambient temperature until a homogeneous solution of PNB photoactiveformulation 1 was achieved. The photoactive solution was filteredthrough a 5.0 μm Teflon filter to remove any remaining undissolved solidmaterial.

Photoactive formulation 1 was applied to a 100 mm Si wafer by spincoating at a first speed of 500 rpm for 10 seconds and then a secondspeed of 2500 rpm for a further 30 seconds to yield a contiguous polymerfilm 9.96 μm thick. The wafer was transferred to a hot plate and bakedfor 5 minutes at 100° C. The polymer film was patterned by an image-wiseexposure to 1000 mJ/cm2 of 365 nm UV radiation through a test patternmask comprising a chrome metal test pattern on a glass substrate. Theexposed sample was allowed to sit at ambient temperature for 10 minutes.The latent pattern was then developed by using a multistep puddle andspray rinse develop recipe 2.38% tetramethyl ammonium hydroxide (TMAH)developer (Shipley CD-26). A 25 mL aliquot of CD-26 was puddled on thewafer for twenty (20) seconds and then the wafer was spun at 200 rpm for10 seconds and the wafer was rinsed with deionized water. The puddle andspray develop process was repeated a total of two times. A minimumpattern resolution of 7 μm lines with a pitch of 70 μm was obtained.

Formulation Examples 2 through 6, which incorporated PP308 PAC, PP459PAC and P343 PAC as additives, were evaluated using the method describedfor Formulation 1. The evaluation data for each of Formulation Examples1 through 6 is presented in Table 2, below.

Comparative Example 1 was generated using the TrisP-PA PAC from ExamplePAC4 presented above, but where the DNQ loading was 67%. This PAC wasobtained from Toyo Gosei Inc. of Japan. For Comparative Example 2PROM1060/PAC 889 (100% DNQ functionality) was employed. Both ComparativeExamples were formulated using the same PNB resin (A*) employed forExamples 1 through 6 and were evaluated using the method described forFormulation 1.

TABLE 2 DR Data DNQ Weight of Weight of Weight of Lithography DataExposed PAC polymer DNQ PAC PGMEA Sensitivity Resolution (1 J/cm²)Formulation DNQ PAC Loading (g) (g) (g) (mJ/cm²) (μm) (nm/sec)Comparative 1 †TrisP-3M6C-2-201 25 phr 8.39 2.10 19.4 404 7 330.9Comparative 2 PROM1060/PAC889 25 phr 8.40 2.10 19.6 976 5 332.1 1 PP475PAC 25 phr 8.40 2.10 19.5 976 7 282.6 2 PP308 PAC 20 phr 8.75 1.75 19.6976 10 961.0 3 PP459 PAC 25 phr 11.0 2.80 26.2 604 20 205.4 4 P343 PAC25 phr 11.2 2.80 26.4 404 7 395.8 5 P343 PAC 20 phr 9.13 1.37 19.5 19410 515.3 †the DNQ loading for this PAC was targeted at 67%, all otherwere targeted at 100%

As it is seen in Table 2, the formulations made with P343 PAC were equalto or better than the comparative examples with regard to sensitivity.

By now it should be realized that PBO resin (A) formulations demonstratesignificantly better imaging and dimensional stability where aNBane-type PAC embodiment in accordance with the present invention isused. With regard to PNB resin (A*) formulations, P343 PAC showedsensitivity performance equal to or better than Comparative Example 1and much better performance with regard Comparitive Example 2, muchbetter sensitivity performance.

We claim:
 1. A norbornane-type ballast compound comprising one of thearylol compounds represented below:


2. A norbornane-type photoactive compound comprising one of thecompounds represented below:

where at least one of OD is a sulfonic acid ester and the remaining ishydroxyl group and wherein said sulfonic acid is selected from:1,2-naphthoquinone-2-diazido-5-sulfonic acid,1,2-naphthoquinone-2-diazido-4-sulfonic acid or2-diazo-4-hydrosulfonylcyclohex-3-enone.
 3. A positive-tonephotosensitive resin composition comprising one of an alkali-solubleresin (A) having a benzoxazole precursor structure in the main chain oran alkali-soluble polynorbomene resin (A*) having a polynorbornene-typestructure in the main chain; a norbornane-type photoactive compoundaccording to claim 2; and a casting solvent.
 4. The positive-tonephotosensitive resin composition of claim 3 where the alkali-solubleresin is a benzoxazole precursor structure in the main chain.